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Professor Reza Moheimani

Professor

School of Elect Engineering and Computer Science (Electrical and Computer Engineering)

Nanoscale engineering

With mobile devices, everyone wants maximum memory on the smallest piece of technology. So scientists are locked in a constant battle to find the most efficient methods of storing data.

In 2009 Professor Reza Moheimani collaborated with researchers at IBM Zurich using a unique nanotechnology approach to create what was then hailed as a world record for data storage: 840 gigabits of information on just one tiny computer chip measuring one square inch.

The achievement won the Institute of Electrical and Electronics Engineers Control System Technology Award, the most prestigious international prize in the field and gained a world record for nanopositioning accuracy. The team designed a control system with an accuracy of one quarter of a nanometre – approximately the diameter of an atom.

This exciting new technology is based on Micro Electro Mechanical Systems, or MEMS. Also known as micro machines, MEMS is the technology of very small mechanical devices made from Silicon and driven by electricity.

"This technology can potentially allow people to carry huge amounts of information on a tiny portable device," Moheimani says. "So an engineer or architect, for instance, could carry all of their drawings in the finest detail around on a pocket-sized device."

For those more interested in using mobile devices for recreational purposes, Moheimani says the extremely dense data storage capacity could hold 25 DVDs on a chip the size of a postage stamp.

Within the University's Centre for Complex Dynamic Systems and Control, he heads the program in mechatronics, a field that combines mechanical, electronic, computer and software engineering disciplines with control theory. Its application is diverse, spanning everything from industrial goods and transport systems to the health sector and personal entertainment devices.Professor Reza Moheimani  in the laboratory

"Nanotechnology is everywhere," Moheimani says. "Most scientists use nanotechnology but we are the ones developing it."

Moheimani established the Laboratory for Dynamics and Control of Nanosystems, a multi-million dollar, state-of-the-art research facility that is at the cutting edge of nanotechnology. Based at the University's Callaghan campus, the laboratory is unrivalled in Australia and is renowned for attracting PhD students and academic visitors from around the globe.

A recent Australian Research Council infrastructure grant will enable a significant expansion of the laboratory providing MEMS researchers world-class capacity for characterisations of micro-machined devices, ensuring they remain at the international forefront of this emerging field.

Moheimani continues to collaborate with the IBM team on the project and received a prestigious Australian Research Council Future Fellowship for his work in the field.

Visit the Centre for Complex and Dynamic Systems and Control

Nanoscale engineering

Nanoscale engineering

Professor Reza Moheimani collaborated with researchers at IBM Zurich using a unique nanotechnology approach to create what was then hailed as a world record for data storage.

Read more

Career Summary

Biography

S. O. Reza Moheimani  received a BSc degree in Electrical and Electronics Engineering from shiraz University, Iran in 1990. He then moved to Australia and completed a MEngSc and a Ph.D. in electrical engineering at the University of New South Wales in 1993 (at UNSW's Kensington Campus, in Sydney) and 1996 (at UNSW's Australian Defence Force Academy Campus in Canberra), respectively. Following completion of his Ph.D. he was a postdoctoral research fellow at the Australian Defence Force Academy, Canberra, Australia.

In 1997 he took up an academic position at the University of Newcastle, where he is currently a Professor and an Australian Research Council Future Fellow in the School of Electrical Engineering and Computer Science. He founded, and directs, the Laboratory for Dynamics and Control of Nanosystems, a multi-million-dollar state-of-the-art research facility dedicated to the advancement of nanotechnology through innovations in systems theory, control engineering and mechatronics. From 2003 - 2010 he served as the Associate Director of Centre for Complex Dynamic Systems and Control (CDSC), an Australian Research Council Centre of Excellence. 

His research has ranged across many areas including robust control theory and robust state estimation of uncertain dynamic systems, applications of control and estimation in nanoscale positioning systems for high-speed scanning probe microscopy, smart structures, active control of noise and vibration, mechatronics and applications of control in microlectromechanical systems (MEMS) and in emerging data storage systems, in which he has published over 250 articles in scientific journals and conference proceedings, as well as several books and edited volumes.

He has served on the editorial boards of a number of journals, including IEEE Transactions on Control Systems Technology, IEEE/ASME Transactions on Mechatronics, Control Engineering Practice and International Journal of Control, Automation and Systems. He has contributed to the organization of and has chaired several international conferences and workshops. His research has been recognized by a number of international awards, including: IFAC Nathaniel B. Nichols Medal (2014), IFAC Mechatronic Systems Award (2013),  IEEE Control Systems Technology Award (2009) and IEEE Transactions on Control Systems Technology Outstanding Paper Award (2007). He is a  Fellow of IEEE, a Fellow of IFAC and a Fellow of the Institute of Physics (UK).

Further information about his research can be found on the following web page: 

<a href=http://mechatronics.newcastle.edu.au/reza/" src="http://mechatronics.newcastle.edu.au/reza/" style="margin:5px;" />

http://mechatronics.newcastle.edu.au/reza/</p><strong>Research Expertise
My main field of expertise is dynamics and control. My theoretical research interests encompass many aspects of robust control and estimation of uncertain dynamic systems, and modelling, identification and control of highly resonant systems. I have also been pursuing applications of the above theories in areas such as mechatronic systems, micro- and nano-systems and smart structures. This aspect of my research has involved a substantial experimental component in my laboratory for dynamics and control of nano-systems. I have also had extensive collaborations with industry (IBM Zurich Research Labs) and Government research organizations (DSTO). Recent research efforts have involved applying advanced control and signal processing methodologies to increase precision and operational bandwidth of scanning probe microscopes.


Qualifications

  • PhD, University of New South Wales
  • Bachelor of Science, Shiraz University - Iran
  • Master of Engineering Science, University of New South Wales

Keywords

  • Control
  • MIcro and Nano Systems
  • Signal Processing
  • Smart Structures
  • Vibration and Noise Control

Fields of Research

CodeDescriptionPercentage
010299Applied Mathematics not elsewhere classified20
029999Physical Sciences not elsewhere classified15
090699Electrical and Electronic Engineering not elsewhere classified65

Professional Experience

UON Appointment

DatesTitleOrganisation / Department
1/01/2014 - ProfessorUniversity of Newcastle
School of Elect Engineering and Computer Science
Australia
1/09/1997 - 29/11/1998Research Acad. - Elect & Comp EngUniversity of Newcastle
Engineering
Australia

Academic appointment

DatesTitleOrganisation / Department
1/11/2009 - 1/12/2015FellowUniversity of Newcastle
School of Elect Engineering and Computer Science
Australia

Membership

DatesTitleOrganisation / Department
Associate Editor - Control Engineering PracticeControl Engineering Practice Journal
Australia
Associate Editor - IEEE Transactions on Control Systems TechnologyIEEE Transactions on Control Systems Technology
Australia
Vice-Chair of Technical Committee on Mechatronic SystemsThe International Federation of Automatic Control (IFAC)
Austria
Senior Member - Institution of Electrical and Electronics Engineers (IEEE)Institution of Electrical and Electronic Engineers
Australia
1/08/2004 - 31/08/2004Guest Editor - Control Engineering Practice, Special Issue on Emerging Technologies fo Active Noise and Vibration Control Systems (August 2004)Control Engineering Practice Journal
Australia
1/01/2001 - 31/01/2001Guest Editor - IEEE Transactions on Control Systems Technology, Special Issue on Dynamics & Control of Smart Structures (Jan. 2001)IEEE Transactions on Control Systems Technology
Australia
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Publications

For publications that are currently unpublished or in-press, details are shown in italics.


Book (4 outputs)

YearCitationAltmetricsLink
2011Eleftheriou E, Moheimani SO, Control Technologies for Emerging Micro and Nanoscale Systems, Springer Verlag, Berlin, Heidelberg, 292 (2011) [A3]
DOI10.1007/978-3-642-22173-6
2006Moheimani SO, Fleming AJ, Piezoelectric Transducers for Vibration Control and Damping, Springer, Berlin, 271 (2006) [A1]
Co-authorsAndrew Fleming
2003Moheimani SO, Halim D, Fleming AJ, Spatial Control of Vibration - Theory and Experiments, World Scientific Publishing Co. Pte. Ltd., Singapore, 223 (2003) [A1]
Co-authorsAndrew Fleming
2001Moheimani SO, Perspectives in Robust Control, Springer, Great Britain, 374 (2001) [A3]
Show 1 more book

Chapter (1 outputs)

YearCitationAltmetricsLink
2011Bazaei A, Yong YK, Moheimani SO, Sebastian A, 'High-speed, ultra-high-precision nanopositioning: A signal transformation approach', Control Technologies for Emerging Micro and Nanoscale Systems, Springer Verlag, Berlin, Heidelberg 47-65 (2011) [B1]
DOI10.1007/978-3-642-22173-6
Co-authorsAli Bazaei, Yuenkuan Yong

Journal article (188 outputs)

YearCitationAltmetricsLink
2015Maroufi M, Fowler AG, Bazaei A, Moheimani SOR, 'High-stroke silicon-on-insulator MEMS nanopositioner: Control design for non-raster scan atomic force microscopy', Review of Scientific Instruments, 86 (2015)

A 2-degree of freedom microelectromechanical systems nanopositioner designed for on-chip atomic force microscopy (AFM) is presented. The device is fabricated using a silicon-on-in... [more]

A 2-degree of freedom microelectromechanical systems nanopositioner designed for on-chip atomic force microscopy (AFM) is presented. The device is fabricated using a silicon-on-insulator-based process and is designed as a parallel kinematic mechanism. It contains a central scan table and two sets of electrostatic comb actuators along each orthogonal axis, which provides displacement ranges greater than ±10 µm. The first in-plane resonance modes are located at 1274 Hz and 1286 Hz for the X and Y axes, respectively. To measure lateral displacements of the stage, electrothermal position sensors are incorporated in the design. To facilitate high-speed scans, the highly resonant dynamics of the system are controlled using damping loops in conjunction with internal model controllers that enable accurate tracking of fast sinusoidal set-points. To cancel the effect of sensor drift on controlled displacements, washout controllers are used in the damping loops. The feedback controlled nanopositioner is successfully used to perform several AFM scans in contact mode via a Lissajous scan method with a large scan area of 20 µm × 20 µm. The maximum scan rate demonstrated is 1 kHz.

DOI10.1063/1.4907908
CitationsWeb of Science - 1
2015Mohammadi A, Moheimani SOR, Yuce MR, 'Parallel Averaging for Thermal Noise Mitigation in MEMS Electrothermal Displacement Sensors', JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 24 4-6 (2015)
DOI10.1109/JMEMS.2014.2364588Author URL
2015Fowler AG, Maroufi M, Moheimani SO, 'Note: A silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy.', Rev Sci Instrum, 86 046107 (2015)
DOI10.1063/1.4918729Author URL
2015Piriyanont B, Fowler AG, Moheimani SOR, 'Force-Controlled MEMS Rotary Microgripper', Journal of Microelectromechanical Systems, (2015)

This paper presents a force-controlled microelectromechanical systems rotary microgripper with integrated electrothermal sensors. The proposed microgripper achieves a large displa... [more]

This paper presents a force-controlled microelectromechanical systems rotary microgripper with integrated electrothermal sensors. The proposed microgripper achieves a large displacement (85 µm) at low driving voltages (=80 V). Closed-loop force control is implemented to ensure the safety of the operation where the controller gain is experimentally tuned so that the desired response is achieved. One of the main contributions of this work is the implementation of a null-displacement feedback control force-sensing technique, where the controller counteracts the input disturbance (contact force) and an integrated electrothermal displacement sensor provides a feedback signal to close the control loop. In this manner, the contact force is measured without moving the structure. Finally, the effectiveness of the controller and the performance of the proposed microgripper are verified by a set of experiments. The results demonstrate the satisfactory performance of the proposed force-controlled microgripper in a practical application. [2014-0374]

DOI10.1109/JMEMS.2015.2388539
2015Moore SI, Coskun MB, Alan T, Neild A, Moheimani SOR, 'Feedback-Controlled MEMS Force Sensor for Characterization of Microcantilevers', Journal of Microelectromechanical Systems, (2015)

This paper outlines the design and characterization of a setup used to measure the stiffness of microcantilevers and other small mechanical devices. Due to the simplicity of fabri... [more]

This paper outlines the design and characterization of a setup used to measure the stiffness of microcantilevers and other small mechanical devices. Due to the simplicity of fabrication, microcantilevers are used as the basis for a variety of mechanical sensor designs. In a range of applications, knowledge of the stiffness of microcantilevers is essential for the accurate calibration of the sensors in which they are used. Stiffness is most commonly identified through measurement of the microcantilever's resonance frequency, which is applied to an empirically derived model. This paper uses a microelectromechanical system (MEMS)-based force sensor to measure the forces produced by a microcantilever when deformed and a piezoelectric tube-based nanopositioner to displace the microcantilever. A method of calibrating the force sensor is presented that takes advantage of the lumped nature of the mechanical system and the nonlinearity of MEMS electrostatic drives. [2014-0183]

DOI10.1109/JMEMS.2014.2382648
2015Mohammadi A, Moheimani SOR, Yuce MR, 'Parallel averaging for thermal noise mitigation in MEMS electrothermal displacement sensors', Journal of Microelectromechanical Systems, 24 4-6 (2015)

The sensitivity of an electrothermal displacement sensor increases with its temperature, whereas a higher temperature range leads to higher thermal noise level, which imposes a tr... [more]

The sensitivity of an electrothermal displacement sensor increases with its temperature, whereas a higher temperature range leads to higher thermal noise level, which imposes a tradeoff on the sensor's achievable resolution. We have developed a multiple sensor displacement measurement technique on a 1-degree-of-freedom silicon-on-insulator microelectromechanical systems nanopositioner that mitigates the mentioned tradeoff. To obtain maximum improvement, it is necessary to supply equal power to all of the sensors to ensure equal sensitivity. By combining three identical sensors, we have successfully achieved a 4-dB improvement in signal-to-noise ratio, which is in a good agreement with the averaging theory. Experiments show that the displacement resolution is improved from 0.3 to 0.15 nm/(Hz) in the prototype nanopositioner. Furthermore, improvement is possible by increasing the number of sensors around the stage. [2014-0120]

DOI10.1109/JMEMS.2014.2364588
2015Maroufi M, Bazaei A, Reza Moheimani SO, 'A high-bandwidth MEMS nanopositioner for on-chip AFM: Design, characterization, and control', IEEE Transactions on Control Systems Technology, 23 504-512 (2015)

We report the design, characterization, and control of a high-bandwidth microelectromechanical systems (MEMS) nanopositioner for on-chip atomic force microscopy (AFM). For the fab... [more]

We report the design, characterization, and control of a high-bandwidth microelectromechanical systems (MEMS) nanopositioner for on-chip atomic force microscopy (AFM). For the fabrication, a commercially available process based on silicon-on-insulator is used. The device consists of a scan table, moved in the x - y plane by two sets of electrostatic comb actuators, capable of generating strokes in excess of ±5 µm. The first resonance frequencies of the nanopositioner are approximately 4.4 and 5.3 kHz in lateral directions. Electrothermal sensors are used to measure the displacement of the scan table. To enable fast scans, a dynamic model of the system is identified and used to design a feedback controller that damps the oscillatory behavior of the device. The nanopositioner is tested as the scanning stage of an AFM to perform high-speed scans.

DOI10.1109/TCST.2014.2345098
CitationsScopus - 1
2015Yong YK, Moheimani SOR, 'Collocated Z-Axis Control of a High-Speed Nanopositioner for Video-Rate Atomic Force Microscopy', IEEE Transactions on Nanotechnology, 14 338-345 (2015)

A key hurdle to achieve video-rate atomic force microscopy (AFM) in constant-force contact mode is the inadequate bandwidth of the vertical feedback control loop. This paper descr... [more]

A key hurdle to achieve video-rate atomic force microscopy (AFM) in constant-force contact mode is the inadequate bandwidth of the vertical feedback control loop. This paper describes techniques used to increase the vertical tracking bandwidth of a nanopositioner to a level that is sufficient for video-rate AFM. These techniques involve the combination of: a high-speed XYZ nanopositioner; a passive damping technique that cancels the inertial forces of the Z actuator which in turns eliminates the low 20-kHz vertical resonant mode of the nanopositioner; an active control technique that is used to augment damping to high vertical resonant modes at 60 kHz and above. The implementation of these techniques allows a tenfold increase in the vertical tracking bandwidth, from 2.3 (without damping) to 28.1 kHz. This allows high-quality, video-rate AFM images to be captured at 10 frames/s without noticeable artifacts associated with vibrations and insufficient vertical tracking bandwidth.

DOI10.1109/TNANO.2015.2394327
Co-authorsYuenkuan Yong
2015Maroufi M, Bazaei A, Mohammadi A, Reza Moheimani SO, 'Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization', Journal of Microelectromechanical Systems, (2015)

We present a comprehensive study of the design, modeling, and characterization of an on-chip piezoresistive displacement sensor. The design is based on the bulk piezoresistivity o... [more]

We present a comprehensive study of the design, modeling, and characterization of an on-chip piezoresistive displacement sensor. The design is based on the bulk piezoresistivity of tilted clamped-guided beams without the need for additional steps to generate doped regions. The sensor is implemented in a one-degree-of-freedom microelectromechanical system (MEMS) nanopositioner, where the beams also function as the suspension system. A standard MEMS fabrication process is used to realize the device on single-crystalline silicon as the structural material. The beams are oppositely tilted to develop tensile and compressive axial forces during stage movement, creating a differential sensing feature. An analytical approach is proposed for modeling and design of the tilted clamped-guided beams. The linearity of the sensor in the differential configuration is investigated analytically. The static, dynamic, and noise characteristics of the sensor are presented, followed by a model-based investigation of the measured dynamic feedthrough. [2015-0030]

DOI10.1109/JMEMS.2015.2426180
2015Maroufi M, Fowler AG, Reza Moheimani SO, 'MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design', Journal of Microelectromechanical Systems, (2015)

The design and characterization of a two-degree-of-freedom serial kinematic microelectromechanical systems (MEMS) nanopositioner for on-chip atomic force microscopy (AFM) is repor... [more]

The design and characterization of a two-degree-of-freedom serial kinematic microelectromechanical systems (MEMS) nanopositioner for on-chip atomic force microscopy (AFM) is reported. A novel design is introduced to achieve a serial kinematic mechanism based on a standard silicon-on-insulator MEMS fabrication process. The nanopositioner comprises a slow axis with a resonance frequency of 2.4 kHz and a fast axis with a resonance frequency of above 4.4 kHz, making it ideal for rastering, as required in the AFM. Strokes of 14 and 9 µm are experimentally achieved for the fast and slow axes, respectively. The serial kinematic design of the stage enables the cross-coupling between the two axes of motion to be as low as -60 dB. Electrothermal displacement sensors are incorporated in the device, which may be used to enable feedback control as required in high-speed AFM. [2014-0248]

DOI10.1109/JMEMS.2015.2434390
2015Ruppert MG, Karvinen KS, Wiggins SL, Reza Moheimani SO, 'A Kalman Filter for Amplitude Estimation in High-Speed Dynamic Mode Atomic Force Microscopy', IEEE Transactions on Control Systems Technology, (2015)

A fundamental challenge in dynamic mode atomic force microscopy (AFM) is the estimation of the cantilever oscillation amplitude from the deflection signal, which might be distorte... [more]

A fundamental challenge in dynamic mode atomic force microscopy (AFM) is the estimation of the cantilever oscillation amplitude from the deflection signal, which might be distorted by noise and/or high-frequency components. When the cantilever is excited at resonance, its deflection is typically obtained via narrow-band demodulation using a lock-in amplifier (LIA). However, the bandwidth of this measurement technique is ultimately bounded by the low-pass filter, which must be employed after demodulation to attenuate the component at twice the carrier frequency. Furthermore, to measure the amplitude of multiple frequency components, such as higher eigenmodes and/or higher harmonics in multifrequency AFM, multiple LIAs must be employed. In this paper, the authors propose the estimation of amplitude and phase using a linear time-varying Kalman filter that is easily extended to multiple frequencies. Experimental results are obtained using square-modulated sine waves and closed-loop AFM scans, verifying the performance of the proposed Kalman filter.

DOI10.1109/TCST.2015.2435654
2015Maroufi M, Bazaei A, Moheimani SOR, 'A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control', IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 23 504-512 (2015)
DOI10.1109/TCST.2014.2345098Author URL
CitationsWeb of Science - 1
Co-authorsAli Bazaei
2015Moore SI, Moheimani SOR, 'Vibration Control With MEMS Electrostatic Drives: A Self-Sensing Approach', IEEE Transactions on Control Systems Technology, 23 1237-1244 (2015)

Nanopositioning is the actuation and sensing of motion on the nanometer scale and recent nanopositioner designs have been utilizing microelectromechanical systems (MEMS). This bri... [more]

Nanopositioning is the actuation and sensing of motion on the nanometer scale and recent nanopositioner designs have been utilizing microelectromechanical systems (MEMS). This brief demonstrates a simple method to implement vibration control on a MEMS nanopositioner. The actuation and sensing of the system are performed with a MEMS electrostatic drive. The electrostatic drive is arranged to be self-sensing, that is, the drive's voltage is used to actuate the system and the drive's current is used to observe the system. With this arrangement, the current is proportional to velocity at the resonance frequency and velocity feedback is used to damp the nanopositioner. To filter the current signal and recover a displacement signal, a charge measurement may be preferred to a current measurement. The self-sensing arrangement was modified to be a charge sensor and resonant control was applied to damp the nanopositioner. With this arrangement, the gain at the resonance frequency was attenuated by 18.45 dB.

DOI10.1109/TCST.2014.2363137
2014Coskun MB, Moore S, Moheimani SOR, Neild A, Alan T, 'Zero displacement microelectromechanical force sensor using feedback control', APPLIED PHYSICS LETTERS, 104 (2014) [C1]
DOI10.1063/1.4871380Author URL
CitationsScopus - 2
2014Bazaei A, Moheimani SOR, 'Synthesis of modulated-demodulated control systems', Automatica, (2014) [C1]

We propose systematic design methods for realization of a given LTI compensator with complex poles using a modulated-demodulated control framework. Applicability of the proposed r... [more]

We propose systematic design methods for realization of a given LTI compensator with complex poles using a modulated-demodulated control framework. Applicability of the proposed realization methods is established through simulations performed on an undamped resonant plant compensated by a low gain controller to obtain better noise rejection performance. It is demonstrated how a modulated-demodulated structure may reduce the sampling rate in a hybrid control system. In addition, superior robust performance is achieved against variations in baseband parameters using direct reference injection into the modulated-demodulated control systems compared to the indirect injection approach. © 2014 Elsevier Ltd. All rights reserved.

DOI10.1016/j.automatica.2014.05.015
Co-authorsAli Bazaei
2014Karvinen KS, Moheimani SOR, 'A high-bandwidth amplitude estimation technique for dynamic mode atomic force microscopy', REVIEW OF SCIENTIFIC INSTRUMENTS, 85 (2014) [C1]
DOI10.1063/1.4865841Author URL
CitationsScopus - 2Web of Science - 2
2014Wadikhaye SP, Yong YK, Reza Moheimani SO, 'A serial-kinematic nanopositioner for high-speed atomic force microscopy', Review of Scientific Instruments, 85 (2014) [C1]

A flexure-guided serial-kinematic XYZ nanopositioner for high-speed Atomic Force Microscopy is presented in this paper. Two aspects influencing the performance of serial-kinematic... [more]

A flexure-guided serial-kinematic XYZ nanopositioner for high-speed Atomic Force Microscopy is presented in this paper. Two aspects influencing the performance of serial-kinematic nanopositioners are studied in this work. First, mass reduction by using tapered flexures is proposed to increased the natural frequency of the nanopositioner. 25% increase in the natural frequency is achieved due to reduced mass with tapered flexures. Second, a study of possible sensor positioning in a serial-kinematic nanopositioner is presented. An arrangement of sensors for exact estimation of cross-coupling is incorporated in the proposed design. A feedforward control strategy based on phaser approach is presented to mitigate the dynamics and nonlinearity in the system. Limitations in design approach and control strategy are discussed in the Conclusion.

DOI10.1063/1.4897483
Co-authorsYuenkuan Yong
2014Karvinen KS, Moheimani SOR, 'Control of the higher eigenmodes of a microcantilever: Applications in atomic force microscopy', ULTRAMICROSCOPY, 137 66-71 (2014) [C1]
DOI10.1016/j.ultramic.2013.11.011Author URL
CitationsScopus - 2Web of Science - 1
2014Mohammadi A, Moheimani SOR, Yuce MR, 'A comparison of two excitation modes for MEMS electrothermal displacement sensors', IEEE Electron Device Letters, 35 584-586 (2014) [C1]

MEMS electrothermal displacement sensors can be operated in constant current (CC) or constant voltage (CV) excitation modes. The CV mode is more commonly used. However, there have... [more]

MEMS electrothermal displacement sensors can be operated in constant current (CC) or constant voltage (CV) excitation modes. The CV mode is more commonly used. However, there have been reports that the CC excitation mode may lead to a larger measured signal, and thus, it may be a better choice than the CV mode. In this letter, we present an analytic comparison of the two methods, and show that from a signal-to-noise-ratio point of view, benefits of operating a sensor in CC mode are only marginal. The analytical investigation is supported by experiments performed on sensors integrated in a SOI-MEMS nanopositioner with low noise read out circuits, which leads to 0.04 Hz displacement resolution for both excitation modes. © 2014 IEEE.

DOI10.1109/LED.2014.2313291
2014Karvinen KS, Moheimani SOR, 'Modulated-demodulated control: Q control of an AFM microcantilever', Mechatronics, 24 661-671 (2014)
DOI10.1016/j.mechatronics.2013.11.011
CitationsScopus - 1
2014Wadikhaye SP, Yong YK, Bhikkaji B, Moheimani SOR, 'Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner', SMART MATERIALS AND STRUCTURES, 23 (2014) [C1]
DOI10.1088/0964-1726/23/2/025030Author URL
CitationsScopus - 2Web of Science - 3
Co-authorsYuenkuan Yong
2014Moore SI, Moheimani SOR, 'Displacement Measurement With a Self-Sensing MEMS Electrostatic Drive', JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 23 511-513 (2014) [C1]
DOI10.1109/JMEMS.2014.2314296Author URL
CitationsScopus - 1
2014Fowler AG, Moheimani SOR, Behrens S, 'An Omnidirectional MEMS Ultrasonic Energy Harvester for Implanted Devices', Journal of Microelectromechanical Systems, (2014) [C1]

This paper presents the design and characterization of a microelectromechanical systems (MEMS)-based energy harvester with target applications, including implanted biomedical sens... [more]

This paper presents the design and characterization of a microelectromechanical systems (MEMS)-based energy harvester with target applications, including implanted biomedical sensors and actuators. The harvester is designed to utilize ultrasonic waves from an external transmitter for mechanical excitation, with electrostatic transducers being used to convert the vibrations of a central mass structure into electrical energy. The device features a novel 3-degrees of freedom design, which enables energy to be produced by the harvester in any orientation. The harvester is fabricated using a conventional silicon-on-insulator MEMS process, with experimental testing showing that the system is able to generate 24.7, 19.8, and 14.5,nW of electrical power, respectively, via the device's x-, y-, and z-axis resonance modes over a 15-s period. [2013-0293].

DOI10.1109/JMEMS.2014.2315199
2014Bazaei A, Maroufi M, Mohammadi A, Moheimani SOR, 'Displacement sensing with silicon flexures in MEMS nanopositioners', Journal of Microelectromechanical Systems, 23 502-504 (2014)
DOI10.1109/JMEMS.2014.2316325
CitationsScopus - 1
Co-authorsAli Bazaei
2014Mohammadi A, Fowler AG, Yong YK, Moheimani SOR, 'A feedback controlled MEMS nanopositioner for on-chip high-speed AFM', Journal of Microelectromechanical Systems, 23 610-619 (2014) [C1]

We report the design of a two-degree-of-freedom microelectromechanical systems nanopositioner for on-chip atomic force microscopy (AFM). The device is fabricated using a silicon-o... [more]

We report the design of a two-degree-of-freedom microelectromechanical systems nanopositioner for on-chip atomic force microscopy (AFM). The device is fabricated using a silicon-on-insulator-based process to function as the scanning stage of a miniaturized AFM. It is a highly resonant system with its lateral resonance frequency at ~850 Hz. The incorporated electrostatic actuators achieve a travel range of 16 ~{&L~}m in each direction. Lateral displacements of the scan table are measured using a pair of electrothermal position sensors. These sensors are used, together with a positive position feedback controller, in a feedback loop, to damp the highly resonant dynamics of the stage. The feedback controlled nanopositioner is used, successfully, to generate high-quality AFM images at scan rates as fast as 100 Hz. © 2013 IEEE.

DOI10.1109/JMEMS.2013.2287506
CitationsScopus - 9Web of Science - 7
Co-authorsYuenkuan Yong
2014Mohammadi A, Moheimani SOR, Yuce MR, 'Parallel Averaging for Thermal Noise Mitigation in MEMS Electrothermal Displacement Sensors', Journal of Microelectromechanical Systems, (2014)

The sensitivity of an electrothermal displacement sensor increases with its temperature, whereas a higher temperature range leads to higher thermal noise level, which imposes a tr... [more]

The sensitivity of an electrothermal displacement sensor increases with its temperature, whereas a higher temperature range leads to higher thermal noise level, which imposes a tradeoff on the sensor¿s achievable resolution. We have developed a multiple sensor displacement measurement technique on a 1-degree-of-freedom silicon-on-insulator microelectromechanical systems nanopositioner that mitigates the mentioned tradeoff. To obtain maximum improvement, it is necessary to supply equal power to all of the sensors to ensure equal sensitivity. By combining three identical sensors, we have successfully achieved a 4-dB improvement in signal-to-noise ratio, which is in a good agreement with the averaging theory. Experiments show that the displacement resolution is improved from 0.3 to 0.15 nm/ v(Hz) in the prototype nanopositioner. Furthermore, improvement is possible by increasing the number of sensors around the stage. [2014-0120]

DOI10.1109/JMEMS.2014.2364588
2014Fowler AG, Moheimani SOR, Behrens S, 'An omnidirectional MEMS ultrasonic energy harvester for implanted devices', Journal of Microelectromechanical Systems, 23 1454-1462 (2014) [C1]

This paper presents the design and characterization of a microelectromechanical systems (MEMS)-based energy harvester with target applications, including implanted biomedical sens... [more]

This paper presents the design and characterization of a microelectromechanical systems (MEMS)-based energy harvester with target applications, including implanted biomedical sensors and actuators. The harvester is designed to utilize ultrasonic waves from an external transmitter for mechanical excitation, with electrostatic transducers being used to convert the vibrations of a central mass structure into electrical energy. The device features a novel 3-degrees of freedom design, which enables energy to be produced by the harvester in any orientation. The harvester is fabricated using a conventional silicon-on-insulator MEMS process, with experimental testing showing that the system is able to generate 24.7, 19.8, and 14.5nW of electrical power, respectively, via the device's x-, y-, and z-axis resonance modes over a 15-s period.

DOI10.1109/JMEMS.2014.2315199
2014Piriyanont B, Moheimani SOR, 'MEMS rotary microgripper with integrated electrothermal force sensor', Journal of Microelectromechanical Systems, 23 1249-1251 (2014)
DOI10.1109/JMEMS.2014.2353034
2014Rakotondrabe M, Fowler AG, Moheimani SOR, 'Control of a Novel 2-DoF MEMS Nanopositioner With Electrothermal Actuation and Sensing', IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 22 1486-1497 (2014) [C1]
DOI10.1109/TCST.2013.2284923Author URL
CitationsScopus - 2
2014Bazaei A, Moheimani SOR, Yong YK, 'Improvement of transient response in signal transformation approach by proper compensator initialization', IEEE Transactions on Control Systems Technology, 22 729-736 (2014)
DOI10.1109/TCST.2013.2261875
Co-authorsYuenkuan Yong, Ali Bazaei
2014Bazaei A, Moheimani SOR, Yong YK, 'Improvement of transient response in signal transformation approach by proper compensator initialization', IEEE Transactions on Control Systems Technology, 22 729-736 (2014) [C1]

In this brief, the transient performance of the signal transformation approach (STA) is considerably enhanced by initializing the state vector of the compensator to appropriate va... [more]

In this brief, the transient performance of the signal transformation approach (STA) is considerably enhanced by initializing the state vector of the compensator to appropriate values. For triangular reference tracking, it is shown that the proposed method is identical to the impulsive state multiplication (ISM) approach. Through simulations and experiments, we also show that the proposed method can be equally applied to improve the STA for arbitrarily shaped desired signals, where ISM is not applicable. Tracking efficacy of the proposed method compared with that of an ordinary feedback loop with a similar noise rejection performance is also demonstrated. © 2013 IEEE.

DOI10.1109/TCST.2013.2261875
Co-authorsYuenkuan Yong, Ali Bazaei
2014Maroufi M, Bazaei A, Moheimani SOR, 'A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control', IEEE Transactions on Control Systems Technology, (2014)

We report the design, characterization, and control of a high-bandwidth microelectromechanical systems (MEMS) nanopositioner for on-chip atomic force microscopy (AFM). For the fab... [more]

We report the design, characterization, and control of a high-bandwidth microelectromechanical systems (MEMS) nanopositioner for on-chip atomic force microscopy (AFM). For the fabrication, a commercially available process based on silicon-on-insulator is used. The device consists of a scan table, moved in the x-y plane by two sets of electrostatic comb actuators, capable of generating strokes in excess of ±5 µm. The first resonance frequencies of the nanopositioner are approximately 4.4 and 5.3 kHz in lateral directions. Electrothermal sensors are used to measure the displacement of the scan table. To enable fast scans, a dynamic model of the system is identified and used to design a feedback controller that damps the oscillatory behavior of the device. The nanopositioner is tested as the scanning stage of an AFM to perform high-speed scans.

DOI10.1109/TCST.2014.2345098
Co-authorsAli Bazaei
2014Fairbairn MW, Müller P, Moheimani SOR, 'Sensorless implementation of a PPF controller for active Q control of an AFM microcantilever', IEEE Transactions on Control Systems Technology, 22 2118-2126 (2014)
DOI10.1109/TCST.2014.2303486
2014Moore SI, Moheimani SOR, 'Vibration Control With MEMS Electrostatic Drives: A Self-Sensing Approach', IEEE Transactions on Control Systems Technology, (2014)
DOI10.1109/TCST.2014.2363137
2014Bazaei A, Moheimani SOR, 'A comprehensive analysis of MEMS electrothermal displacement sensors', IEEE Sensors Journal, 14 3183-3192 (2014) [C1]

For electrothermal microelectromechanical system position sensors, we introduce a novel analytical model that captures the nonuniform distribution of temperature as well as the no... [more]

For electrothermal microelectromechanical system position sensors, we introduce a novel analytical model that captures the nonuniform distribution of temperature as well as the nonlinear dependence of resistivity on temperature. The proposed model also captures the effects of contoured beam heaters and the nonuniformity of the air gap between the heat-sink and the heaters, which varies with heat-sink position and is differentially transduced into the output voltage. The model accurately predicts the experimentally obtained I - V data and the corresponding sensor output. It also explains the considerable improvement achieved in the linearity of the sensor response when the beam profiles are appropriately shaped to yield a more uniform temperature distribution. The shaped sensor is compared with conventional uniform electrothermal sensors under two different operating conditions, voltage, and current bias modes. Improved linearity is observed in both cases. The model is also applicable to predict the dynamic response of the sensor. An iterative procedure is developed to solve the additional complexity in voltage mode, which is a nonlinear partial integro-differential equation. Considering different bias modes and heater profiles, we evaluate the sensor bandwidth and linearity using the model and conduct experiments to validate the results. Based on first principles, the proposed model is more transparent than sophisticated software-based approaches and compatible with traditional solvers in MATLAB. © 2014 IEEE.

DOI10.1109/JSEN.2014.2326685
Co-authorsAli Bazaei
2014Yong YK, Bazaei A, Moheimani SOR, 'Video-rate lissajous-scan atomic force microscopy', IEEE Transactions on Nanotechnology, 13 85-93 (2014) [C1]

Raster scanning is common in atomic force microscopy (AFM). The nonsmooth raster waveform contains high-frequency content that can excite mechanical resonances of an AFM nanoposit... [more]

Raster scanning is common in atomic force microscopy (AFM). The nonsmooth raster waveform contains high-frequency content that can excite mechanical resonances of an AFM nanopositioner during a fast scan, causing severe distortions in the resulting image. The mainstream approach to avoid scan-induced vibrations in video-rate AFM is to employ a high-bandwidth nanopositioner with the first lateral resonance frequency above 20 kHz. In this paper, video-rate scanning on a nanopositioner with 11.3-kHz resonance frequency is reported using a smooth Lissajous scan pattern. The Lissajous trajectory is constructed by tracking two sinusoidal waveforms on the lateral axes of the nanopositioner. By combining an analog integral resonant controller (IRC) with an internal model controller, 1-and 2-kHz single tone set-points were successfully tracked. High-quality time lapsed AFM images of a calibration grating recorded at 9 and 18 frames/s without noticeable image distortions are reported. © 2013 IEEE.

DOI10.1109/TNANO.2013.2292610
CitationsScopus - 2Web of Science - 2
Co-authorsYuenkuan Yong, Ali Bazaei
2014Karvinen KS, Ruppert MG, Mahata K, Moheimani SOR, 'Direct tip-sample force estimation for high-speed dynamic mode atomic force microscopy', IEEE Transactions on Nanotechnology, 13 1257-1265 (2014) [C1]

We present new insights into the modeling of the microcantilever in dynamic mode atomic force microscopy and outline a novel high-bandwidth tip-sample force estimation technique f... [more]

We present new insights into the modeling of the microcantilever in dynamic mode atomic force microscopy and outline a novel high-bandwidth tip-sample force estimation technique for the development of high-bandwidth z -axis control. Fundamental to the proposed technique is the assumption that in tapping mode atomic force microscopy, the tip-sample force takes the form of an impulse train. Formulating the estimation problem as a Kalman filter, the tip-sample force is estimated directly; thus, potentially enabling high-bandwidth z-axis control by eliminating the dependence of the control technique on microcantilever dynamics and the amplitude demodulation technique. Application of this technique requires accurate knowledge of the models of the microcantilever; a novel identification method is proposed. Experimental data are used in an offline analysis for verification.

DOI10.1109/TNANO.2014.2360878
Co-authorsKaushik Mahata
2014Fowler AG, Moheimani SOR, Behrens S, 'An omnidirectional MEMS ultrasonic energy harvester for implanted devices', Journal of Microelectromechanical Systems, 23 1454-1462 (2014) [C1]

This paper presents the design and characterization of a microelectromechanical systems (MEMS)-based energy harvester with target applications, including implanted biomedical sens... [more]

This paper presents the design and characterization of a microelectromechanical systems (MEMS)-based energy harvester with target applications, including implanted biomedical sensors and actuators. The harvester is designed to utilize ultrasonic waves from an external transmitter for mechanical excitation, with electrostatic transducers being used to convert the vibrations of a central mass structure into electrical energy. The device features a novel 3-degrees of freedom design, which enables energy to be produced by the harvester in any orientation. The harvester is fabricated using a conventional silicon-on-insulator MEMS process, with experimental testing showing that the system is able to generate 24.7, 19.8, and 14.5nW of electrical power, respectively, via the device's x-, y-, and z-axis resonance modes over a 15-s period.

DOI10.1109/JMEMS.2014.2315199
2014Karvinen KS, Moheimani SOR, 'Modulated-demodulated control: Q control of an AFM microcantilever', Mechatronics, 24 661-671 (2014) [C1]

We outline the application of modulated-demodulated control to the quality (Q) factor control of an atomic force microscope microcantilever. We review the modulated-demodulated co... [more]

We outline the application of modulated-demodulated control to the quality (Q) factor control of an atomic force microscope microcantilever. We review the modulated-demodulated control technique, emphasize its linear time invariant nature and develop state space representations of the controller for design and analysis. The modulated-demodulated controller can be configured as both positive position feedback (PPF) and resonant controllers, which are effective in the control of negative imaginary systems. Negative imaginary systems theory has important application in the control of collocated mechanical systems and we briefly summarize the key relevant results. A high-frequency, tunable modulated-demodulated controller, designed specifically for MHz operation, was developed for experimental validation. The modulated-demodulated controller enables the use of a low-bandwidth baseband controller in the configuration of a high-bandwidth controller, thus simplifying the implementation of high-bandwidth controllers. We outline the controller characterization and demonstrate closed-loop control of a Bruker DMASP microcantilever. We also present AFM images highlighting the improvements in scan speed and image quality achieved as a result of Q control. Modulated-demodulated control appears well suited to the control of high-frequency resonant dynamics. In addition to high-speed atomic force microscopy, we believe this control technique may find applications in high-frequency microelectromechanical systems (MEMS). © 2014 Elsevier Ltd. All rights reserved.

DOI10.1016/j.mechatronics.2013.11.011
CitationsScopus - 1Web of Science - 2
2014Bazaei A, Maroufi M, Mohammadi A, Moheimani SOR, 'Displacement sensing with silicon flexures in MEMS nanopositioners', Journal of Microelectromechanical Systems, 23 502-504 (2014) [C1]

We report a novel piezoresistive microelectromechanical system (MEMS) differential displacement sensing technique with a minimal footprint realized through a standard MEMS fabrica... [more]

We report a novel piezoresistive microelectromechanical system (MEMS) differential displacement sensing technique with a minimal footprint realized through a standard MEMS fabrication process, whereby no additional doping is required to build the piezoresistors. The design is based on configuring a pair of suspension beams attached to a movable stage so that they experience opposite axial forces when the stage moves. The resulting difference between the beam resistances is transduced into a sensor output voltage using a half-bridge readout circuit and differential amplifier. Compared with a single piezoresistive flexure sensor, the design approximately achieves 2, 22, and 200 times improvement in sensitivity, linearity, and resolution, respectively, with 1.5-nm resolution over a large travel range exceeding 12 ?m. © 2014 IEEE.

DOI10.1109/JMEMS.2014.2316325
CitationsScopus - 1Web of Science - 1
Co-authorsAli Bazaei
2014Piriyanont B, Moheimani SOR, 'MEMS rotary microgripper with integrated electrothermal force sensor', Journal of Microelectromechanical Systems, 23 1249-1251 (2014) [C1]

A microelectromechanical systems (MEMS) rotary microgripper incorporating electrothermal force sensors is reported. The device is fabricated using a standard SOI-MEMS process and ... [more]

A microelectromechanical systems (MEMS) rotary microgripper incorporating electrothermal force sensors is reported. The device is fabricated using a standard SOI-MEMS process and achieves a stroke of (90 µm) at a relatively low voltage (<80 V). The electrothermal force sensor has a small footprint, is quite linear, and operates with a high accuracy. Being fabricated from biocompatible material (silicon) with sufficiently long gripping arms, the gripper can be used to manipulate living cells, tissues, and other biologically relevant samples. A pick-and-place experiment on a soft cell is conducted to verify performance of the proposed rotary microgripper.

DOI10.1109/JMEMS.2014.2353034
2014Fairbairn MW, Müller P, Moheimani SOR, 'Sensorless implementation of a PPF controller for active Q control of an AFM microcantilever', IEEE Transactions on Control Systems Technology, 22 2118-2126 (2014) [C1]

Reducing the cantilever quality $(Q)$ factor in the atomic force microscope (AFM), when operating in tapping mode, allows for an increase in imaging speed. Passive piezoelectric s... [more]

Reducing the cantilever quality $(Q)$ factor in the atomic force microscope (AFM), when operating in tapping mode, allows for an increase in imaging speed. Passive piezoelectric shunt control has several advantages over alternative methods of cantilever $Q$ factor reduction. However, this technique uses a passive electrical impedance to modify the mechanical dynamics of the cantilever, which limits the amount of $Q$ factor reduction achievable. This paper demonstrates that further reductions in the cantilever $Q$ factor may be obtained with the use of an active impedance in the piezoelectric shunt control framework. The active impedance parameters are designed in such a way that the piezoelectric shunt controller emulates a positive position feedback controller in a displacement feedback control loop. A significant reduction in cantilever $Q$ factor is obtained using an active impedance compared with that achieved with a passive impedance. The improvement in scan speed using this control technique is demonstrated with AFM images of a test sample.

DOI10.1109/TCST.2014.2303486
2014Moore SI, Moheimani SOR, 'Vibration Control With MEMS Electrostatic Drives: A Self-Sensing Approach', IEEE Transactions on Control Systems Technology, (2014) [C1]

Nanopositioning is the actuation and sensing of motion on the nanometer scale and recent nanopositioner designs have been utilizing microelectromechanical systems (MEMS). This bri... [more]

Nanopositioning is the actuation and sensing of motion on the nanometer scale and recent nanopositioner designs have been utilizing microelectromechanical systems (MEMS). This brief demonstrates a simple method to implement vibration control on a MEMS nanopositioner. The actuation and sensing of the system are performed with a MEMS electrostatic drive. The electrostatic drive is arranged to be self-sensing, that is, the drive¿s voltage is used to actuate the system and the drive¿s current is used to observe the system. With this arrangement, the current is proportional to velocity at the resonance frequency and velocity feedback is used to damp the nanopositioner. To filter the current signal and recover a displacement signal, a charge measurement may be preferred to a current measurement. The self-sensing arrangement was modified to be a charge sensor and resonant control was applied to damp the nanopositioner. With this arrangement, the gain at the resonance frequency was attenuated by 18.45 dB.

DOI10.1109/TCST.2014.2363137
2013Bhikkaji B, Yong YK, Mahmood IA, Moheimani SOR, 'Diagonal control design for atomic force microscope piezoelectric tube nanopositioners', REVIEW OF SCIENTIFIC INSTRUMENTS, 84 (2013) [C1]
DOI10.1063/1.4790474Author URL
CitationsScopus - 2Web of Science - 1
Co-authorsYuenkuan Yong
2013Ruppert MG, Moheimani SOR, 'A novel self-sensing technique for tapping-mode atomic force microscopy', Review of Scientific Instruments, 84 (2013) [C1]
DOI10.1063/1.4841855Author URL
CitationsScopus - 1Web of Science - 1
2013Fairbairn M, Moheimani SOR, 'Sensorless enhancement of an atomic force microscope micro-cantilever quality factor using piezoelectric shunt control', Review of Scientific Instruments, 84 (2013) [C1]
DOI10.1063/1.4805108
CitationsScopus - 4Web of Science - 3
2013Fowler AG, Moheimani SOR, Behrens S, 'Design and Characterization of a 2-DOF MEMS Ultrasonic Energy Harvester With Triangular Electrostatic Electrodes', IEEE Electron Device Letters, 34 1421-1423 (2013) [C1]
DOI10.1109/LED.2013.2282815Author URL
CitationsWeb of Science - 1
2013Laskovski AN, Yuce MR, Moheimani SOR, 'FM-based piezoelectric strain voltage sensor at ultra-low frequencies with wireless capability', SENSORS AND ACTUATORS A-PHYSICAL, 199 49-55 (2013) [C1]
DOI10.1016/j.sna.2013.04.034Author URL
CitationsScopus - 4Web of Science - 3
2013Aphale SS, Ferreira A, Moheimani SOR, 'A robust loop-shaping approach to fast and accurate nanopositioning', Sensors and Actuators, A: Physical, 204 88-96 (2013) [C1]
DOI10.1016/j.sna.2013.10.006
CitationsScopus - 2Web of Science - 1
2013Fowler AG, Bazaei A, Moheimani SOR, 'Design and Analysis of Nonuniformly Shaped Heaters for Improved MEMS-Based Electrothermal Displacement Sensing', JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 22 687-694 (2013) [C1]
DOI10.1109/JMEMS.2013.2240261Author URL
CitationsScopus - 10Web of Science - 8
Co-authorsAli Bazaei
2013Moheimani SOR, Eleftheriou E, 'Dynamics and control of micro- and nanoscale systems: An introduction to the special issue', IEEE Control Systems, 33 42-45 (2013) [C3]

The articles in this special issue of IEEE Control Systems Magazine are selected from the papers presented at the Second Workshop on Dynamics and Control of Micro- and Nanoscale S... [more]

The articles in this special issue of IEEE Control Systems Magazine are selected from the papers presented at the Second Workshop on Dynamics and Control of Micro- and Nanoscale Systems, which was held at the University of Newcastle, Australia, in February 2012. A report on the workshop appeared in the December 2012 issue of this magazine [1]. Control is a critical technology for emerging micro- and nanoscale systems. Control at such small scales is difficult. These systems tend to have very fast dynamics, which makes control implementation a challenging task for the control engineer. Often significant uncertainty is associated with the dynamic models of these systems, which can also be nonlinear and time varying. Furthermore, sensing at such small scales is a demanding task, and sensor noise often is a key concern. The problems faced by control engineers at the micro- and nanoscales are therefore among the most challenging in the field. © 2013 IEEE.

DOI10.1109/MCS.2013.2279467
2013Fairbairn MW, Moheimani SOR, 'Control Techniques for Increasing the Scan Speed and Minimizing Image Artifacts in Tapping-Mode Atomic Force Microscopy: Toward Video-Rate Nanoscale Imaging', IEEE Control Systems Magazine, 33 46-67 (2013) [C1]
DOI10.1109/MCS.2013.2279471Author URL
CitationsScopus - 3Web of Science - 3
2013Yong YK, Bhikkaji B, Moheimani SOR, 'Design, Modeling, and FPAA-Based Control of a High-Speed Atomic Force Microscope Nanopositioner', IEEE-ASME TRANSACTIONS ON MECHATRONICS, 18 1060-1071 (2013) [C1]
DOI10.1109/TMECH.2012.2194161Author URL
CitationsScopus - 20Web of Science - 15
Co-authorsYuenkuan Yong
2013Yong YK, Fleming AJ, Moheimani SOR, 'A Novel Piezoelectric Strain Sensor for Simultaneous Damping and Tracking Control of a High-Speed Nanopositioner', IEEE-ASME TRANSACTIONS ON MECHATRONICS, 18 1113-1121 (2013) [C1]
DOI10.1109/TMECH.2012.2193895Author URL
CitationsScopus - 26Web of Science - 18
Co-authorsAndrew Fleming, Yuenkuan Yong
2013Yong YK, Mohemani SOR, 'Design of an Inertially Counterbalanced Z-Nanopositioner for High-Speed Atomic Force Microscopy', IEEE TRANSACTIONS ON NANOTECHNOLOGY, 12 137-145 (2013) [C1]
DOI10.1109/TNANO.2012.2233749Author URL
CitationsScopus - 12Web of Science - 10
Co-authorsYuenkuan Yong
2012Bazaei A, Moheimani SO, 'Signal transformation approach to tracking control with arbitrary references', IEEE Transactions on Automatic Control, 57 2294-2307 (2012) [C1]
DOI10.1109/TAC.2012.2186474
CitationsScopus - 3Web of Science - 3
Co-authorsAli Bazaei
2012Bazaei A, Yong YK, Moheimani SO, 'High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues', Review of Scientific Instruments, 83 (2012) [C1]
DOI10.1063/1.4725525
CitationsScopus - 25Web of Science - 17
Co-authorsAli Bazaei, Yuenkuan Yong
2012Fairbairn MW, Moheimani SO, 'Resonant control of an atomic force microscope micro-cantilever for active Q control', Review of Scientific Instruments, 83 083708 (2012) [C1]
DOI10.1063/1.4746277
CitationsScopus - 9Web of Science - 5
2012Yong YK, Moheimani SO, Kenton BJ, Leang KK, 'Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues', Review of Scientific Instruments, 83 (2012) [C1]
DOI10.1063/1.4765048
CitationsScopus - 49Web of Science - 40
Co-authorsYuenkuan Yong
2012Mohammadi A, Yuce MR, Moheimani SO, 'A low-flicker-noise MEMS electrothermal displacement sensing technique', IEEE Journal of Microelectromechanical Systems, 21 1279-1281 (2012) [C1]
CitationsScopus - 10Web of Science - 8
2012Fowler AG, Laskovski AN, Hammond AC, Moheimani SO, 'A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM', Journal of Microelectromechanical Systems, 21 771-773 (2012) [C1]
DOI10.1109/JMEMS.2012.2191940
CitationsScopus - 24Web of Science - 18
2012Bazaei A, Yong YK, Moheimani SO, Sebastian A, 'Tracking of triangular references using signal transformation for control of a novel AFM scanner stage', IEEE Transactions on Control Systems Technology, 20 453-464 (2012) [C1]
DOI10.1109/TCST.2011.2114347
CitationsScopus - 26Web of Science - 21
Co-authorsYuenkuan Yong, Ali Bazaei
2012Cherubini G, Chung CC, Messner WC, Moheimani SO, 'Introduction to the special section on advanced servo control for emerging data storage systems', IEEE Transactions on Control Systems Technology, 20 292-295 (2012) [C3]
2012Cherubini G, Chung CC, Messner WC, Moheimani SO, 'Control methods in data-storage systems', IEEE Transactions on Control Systems Technology, 20 296-322 (2012) [C1]
DOI10.1109/TCST.2011.2176942
CitationsScopus - 13Web of Science - 7
2012Jan, Moheimani SOR, 'Another closely linked problem that I have been interested in for a long time is fault-tolerant control', IEEE CONTROL SYSTEMS MAGAZINE, 32 20-25 (2012) [O1]
DOI10.1109/MCS.2012.2185889Author URL
2012Bhikkaji B, Moheimani SO, Petersen IR, 'A negative imaginary approach to modeling and control of a collocated structure', IEEE-ASME Transactions on Mechatronics, 17 717-727 (2012) [C1]
DOI10.1109/TMECH.2011.2123909
CitationsScopus - 19Web of Science - 17
2012Zhu Y, Moheimani SO, Yuce MR, 'Bidirectional electrothermal actuator with Z-shaped beams', IEEE Sensors Journal, 12 2508-2509 (2012) [C1]
DOI10.1109/JSEN.2012.2194141
CitationsScopus - 8Web of Science - 6
2012Bazaei A, Zhu Y, Moheimani SO, Yuce MR, 'Analysis of nonlinear phenomena in a thermal micro-actuator with a built-in thermal position sensor', IEEE Sensors Journal, 12 1772-1784 (2012) [C1]
DOI10.1109/JSEN.2011.2178236
CitationsScopus - 13Web of Science - 10
Co-authorsAli Bazaei
2012Mohammadi A, Yuce MR, Moheimani SO, 'Frequency modulation technique for MEMS resistive sensing', IEEE Sensors Journal, 12 2690-2698 (2012) [C1]
DOI10.1109/JSEN.2012.2198807
CitationsScopus - 11Web of Science - 9
2012Fairbairn MW, Moheimani SO, 'A switched gain resonant controller to minimize image artifacts in intermittent contact mode atomic force microscopy', IEEE Transactions on Nanotechnology, 11 1126-1134 (2012) [C1]
CitationsScopus - 4Web of Science - 4
2012Wadikhaye S, Yong YK, Moheimani SO, 'Design of a compact serial-kinematic scanner for high-speed atomic force microscopy: An analytical approach', Micro & Nano Letters, 7 309-313 (2012) [C1]
DOI10.1049/mnl.2011.0477
CitationsScopus - 9Web of Science - 9
Co-authorsYuenkuan Yong
2011Zhu Y, Moheimani SO, Yuce MR, 'A 2-DOF MEMS Ultrasonic Energy Harvester', IEEE Sensors Journal, 11 155-161 (2011) [C1]
DOI10.1109/JSEN.2010.2053922
CitationsScopus - 26Web of Science - 20
2011Mahmood IA-T, Moheimani SO, Bhikkaji B, 'A new scanning method for fast atomic force microscopy', IEEE Transactions on Nanotechnology, 10 203-216 (2011) [C1]
DOI10.1109/tnano.2009.2036844
CitationsScopus - 42Web of Science - 31
2011Bazaei A, Moheimani SO, Sebastian A, 'An analysis of signal transformation approach to triangular waveform tracking', Automatica, 47 838-847 (2011) [C1]
DOI10.1016/j.automatica.2011.01.075
CitationsScopus - 8Web of Science - 6
Co-authorsAli Bazaei
2011Laskovski AN, Moheimani SO, Yuce MR, 'Note: Piezoelectric strain voltage sensing at ultra-low frequencies', Review of Scientific Instruments, 82 086113 (2011) [C3]
DOI10.1063/1.3628664
CitationsScopus - 2Web of Science - 2
2011Eleftheriou E, Moheimani SOR, 'Preface', Lecture Notes in Control and Information Sciences, 413 (2011) [C3]
2011Zhu Y, Moheimani SO, Yuce MR, 'Simultaneous capacitive and electrothermal position sensing in a micromachined nanopositioner', IEEE Electron Device Letters, 32 1146-1148 (2011) [C1]
DOI10.1109/LED.2011.2155027
CitationsScopus - 20Web of Science - 14
2011Zhu Y, Bazaei A, Moheimani SO, Yuce MR, 'Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing', Journal of Microelectromechanical Systems, 20 711-719 (2011) [C1]
DOI10.1109/JMEMS.2011.2140358
CitationsScopus - 24Web of Science - 19
Co-authorsAli Bazaei
2011Fairbairn MW, Moheimani SO, Fleming AJ, 'Q control of an atomic force microscope microcantilever: A sensorless approach', Journal of Microelectromechanical Systems, 20 1372-1381 (2011) [C1]
DOI10.1109/JMEMS.2011.2168809
CitationsScopus - 23Web of Science - 18
Co-authorsAndrew Fleming
2011Pereira E, Aphale SS, Feliu V, Moheimani SO, 'Integral resonant control for vibration damping and precise tip-positioning of a single-link flexible manipulator', IEEE-ASME Transactions on Mechatronics, 16 232-240 (2011) [C1]
DOI10.1109/tmech.2009.2039713
CitationsScopus - 38Web of Science - 31
2010Fleming AJ, Aphale SS, Moheimani SO, 'A new method for robust damping and tracking control of scanning probe microscope positioning stages', IEEE Transactions on Nanotechnology, 9 438-448 (2010) [C1]
DOI10.1109/TNANO.2009.2032418
CitationsScopus - 76Web of Science - 56
Co-authorsAndrew Fleming
2010Yong YK, Ahmad BA, Moheimani SO, 'Atomic force microscopy with a 12-electrode piezoelectric tube scanner', Review of Scientific Instruments, 81 10 (2010) [C1]
DOI10.1063/1.3314901
CitationsScopus - 29Web of Science - 14
Co-authorsYuenkuan Yong
2010Zhu Y, Moheimani SO, Yuce MR, 'Ultrasonic energy transmission and conversion using a 2-D MEMS resonator', IEEE Electron Device Letters, 31 374-376 (2010) [C1]
DOI10.1109/LED.2010.2040575
CitationsScopus - 14Web of Science - 12
2010Zhu Y, Bazaei A, Moheimani SO, Yuce MR, 'A micromachined nanopositioner with on-chip electrothermal actuation and sensing', IEEE Electron Device Letters, 31 1161-1163 (2010) [C1]
DOI10.1109/LED.2010.2058841
CitationsScopus - 16Web of Science - 16
Co-authorsAli Bazaei
2010Gawthrop PJ, Bhikkaji B, Moheimani SO, 'Physical-model-based control of a piezoelectric tube for nano-scale positioning applications', Mechatronics, 20 74-84 (2010) [C1]
DOI10.1016/j.mechatronics.2009.09.006
CitationsScopus - 7Web of Science - 5
2010Yong YK, Moheimani SO, Petersen IR, 'High-speed cycloid-scan atomic force microscopy', Nanotechnology, 21 1-4 (2010) [C1]
DOI10.1088/0957-4484/21/36/365503
CitationsScopus - 38Web of Science - 31
Co-authorsYuenkuan Yong
2010Bazaei A, Yong YK, Moheimani SOR, Sebastian A, 'Tracking Control of a Novel AFM Scanner using Signal Transformation Method', IEEE Transactions on Control Systems Technology, 20 453-464 (2010) [C1]
DOI10.1109/TCST.2011.2114347
Co-authorsYuenkuan Yong, Ali Bazaei
2010Yong YK, Liu K, Moheimani SO, 'Reducing cross-coupling in a compliant XY nanopositioner for fast and accurate raster scanning', IEEE Transactions on Control Systems Technology, 18 1172-1179 (2010) [C1]
DOI10.1109/TCST.2009.2033201
CitationsScopus - 59Web of Science - 47
Co-authorsYuenkuan Yong
2009Aphale SS, Bhikkaji B, Moheimani SOR, 'Minimizing Scanning Errors in Piezoelectric Stack-Actuated Nanopositioning Platforms (vol 7, pg 79, 2008)', IEEE TRANSACTIONS ON NANOTECHNOLOGY, 8 560-560 (2009) [C3]
DOI10.1109/TNANO.2009.2027168Author URL
2009Yong YK, Aphale SS, Moheimani SO, 'Design, identification, and control of a flexure-based XY stage for fast nanoscale positioning', IEEE Transactions on Nanotechnology, 8 46-54 (2009) [C1]
DOI10.1109/tnano.2008.2005829
CitationsScopus - 153Web of Science - 112
Co-authorsYuenkuan Yong
2009Mahmood IA-T, Moheimani SO, Liu K, 'Tracking control of a nanopositioner using complementary sensors', IEEE Transactions on Nanotechnology, 8 55-65 (2009) [C1]
DOI10.1109/tnano.2008.2005183
CitationsScopus - 19Web of Science - 17
2009Mahmood IA-T, Moheimani SO, 'Making a commercial atomic force microscope more accurate and faster using positive position feedback control', Review of Scientific Instruments, 80 1-8 (2009) [C1]
DOI10.1063/1.3155790
CitationsScopus - 60Web of Science - 21
2009Sebastian A, Moheimani SO, 'Signal transformation approach to fast nanopositioning', Review of Scientific Instruments, 80 1-3 (2009) [C1]
DOI10.1063/1.3160016
CitationsScopus - 22Web of Science - 14
2009Mahmood IA-T, Moheimani SO, 'Fast spiral-scan atomic force microscopy', Nanotechnology, 20 365503 (2009) [C1]
DOI10.1088/0957-4484/20/36/365503
CitationsScopus - 37Web of Science - 35
2008Wills AG, Bates DR, Fleming AJ, Ninness BM, Moheimani SO, 'Model predictive control applied to constraint handling in active noise and vibration control', IEEE Transactions on Control Systems Technology, 16 3-12 (2008) [C1]
DOI10.1109/tcst.2007.903062
CitationsScopus - 57Web of Science - 32
Co-authorsAndrew Fleming, Brett Ninness
2008Fleming AJ, Wills AG, Moheimani SO, 'Sensor fusion for improved control of piezoelectric tube scanners', IEEE Transactions on Control Systems Technology, 16 1265-1276 (2008) [C1]
DOI10.1109/tcst.2008.921798
CitationsScopus - 35Web of Science - 28
Co-authorsAndrew Fleming
2008Mahmood IA, Moheimani SOR, Bhikkaji B, 'Precise tip positioning of a flexible manipulator using resonant control', IEEE-ASME TRANSACTIONS ON MECHATRONICS, 13 180-186 (2008) [C2]
DOI10.1109/TMECH.2008.918494Author URL
CitationsScopus - 25Web of Science - 22
2008Bhikkaji B, Moheimani SO, 'Integral resonant control of a piezoelectric tube actuator for fast nanoscale positioning', IEEE/ASME Transactions on Mechatronics, 13 530-537 (2008) [C1]
DOI10.1109/tmech.2008.2001186
CitationsScopus - 87Web of Science - 66
2008Aphale SS, Bhikkaji B, Moheimani SO, 'Minimizing scanning errors in piezoelectric stack-actuated nanopositioning platforms', IEEE Transactions on Nanotechnology, 7 79-90 (2008) [C1]
DOI10.1109/tnano.2007.910333
CitationsScopus - 66Web of Science - 49
2008Sebastian A, Pantazi A, Moheimani SO, Pozidis H, Eleftheriou E, 'Achieving subnanometer precision in a MEMS-based storage device during self-servo write process', IEEE Transactions on Nanotechnology, 7 586-595 (2008) [C1]
DOI10.1109/tnano.2008.926441
CitationsScopus - 56Web of Science - 47
2008Moheimani SO, Yong YK, 'Simultaneous sensing and actuation with a piezoelectric tube scanner', Review of Scientific Instruments, 79 (2008) [C1]
DOI10.1063/1.2952506
CitationsScopus - 25Web of Science - 22
Co-authorsYuenkuan Yong
2008Moheimani SO, 'Invited Review Article: Accurate and fast nanopositioning with piezoelectric tube scanners: Emerging trends and future challenges', Review of Scientific Instruments, 79 (2008) [C1]
DOI10.1063/1.2957649
CitationsScopus - 105Web of Science - 83
2008Clayton GM, Tien S, Fleming AJ, Moheimani SO, Devasia S, 'Inverse-feedforward of charge-controlled piezopositioners', Mechatronics, 18 273-281 (2008) [C1]
DOI10.1016/j.mechatronics.2007.07.006
CitationsScopus - 51Web of Science - 46
Co-authorsAndrew Fleming
2008Aphale SS, Devasia S, Moheimani SO, 'High-bandwidth control of a piezoelectric nanopositioning stage in the presence of plant uncertainties', Nanotechnology, 19 1-9 (2008) [C1]
DOI10.1088/0957-4484/19/12/125503
CitationsScopus - 67Web of Science - 52
2008Pereira E, Moheimani SO, Aphale SS, 'Analog implementation of an integral resonant control scheme', Smart Materials & Structures, 17 1-6 (2008) [C1]
DOI10.1088/0964-1726/17/6/067001
CitationsScopus - 7Web of Science - 4
2007Bhikkaji B, Ratnam MR, Moheimani SO, 'PVPF control of piezoelectric tube scanners', Sensors and Actuators A: Physical, 135 700-712 (2007) [C1]
DOI10.1016/j.sna.2006.07.032
CitationsScopus - 27Web of Science - 24
2007Aphale SS, Fleming AJ, Moheimani SO, 'High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control', Micro and Nano Letters, 2 9-12 (2007) [C1]
DOI10.1049/mnl:20065075
CitationsScopus - 34Web of Science - 28
Co-authorsAndrew Fleming
2007Aphale SS, Fleming AJ, Moheimani SO, 'Integral resonant control of collocated smart structures', Smart Materials & Structures, 16 439-446 (2007) [C1]
DOI10.1088/0964-1726/16/2/023
CitationsScopus - 97
Co-authorsAndrew Fleming
2007Moheimani SO, Goodwin GC, 'Mechatronic systems (Editorial)', Control Engineering Practice, 15 275-276 (2007) [C3]
DOI10.1016/j.conengprac.2006.08.006
Co-authorsGraham Goodwin
2007Lau K, Quevedo DE, Vautier BJG, Goodwin GC, Moheimani SO, 'Design of modulated and demodulated controllers for flexible structures', Control Engineering Practice, 15 377-388 (2007) [C1]
DOI10.1016/j.conengprac.2005.09.004
CitationsScopus - 12Web of Science - 9
Co-authorsGraham Goodwin, Daniel Quevedo
2007Fleming AJ, Niederberger D, Moheimani SO, Morari M, 'Control of resonant acoustic sound fields by electrical shunting of a loudspeaker', IEEE Transactions on Control Systems Technology, 15 689-703 (2007) [C1]
DOI10.1109/tcst.2006.890276
CitationsScopus - 22Web of Science - 7
Co-authorsAndrew Fleming
2007Devasia S, Eleftheriou E, Moheimani SO, 'A survey of control issues in nanopositioning', IEEE Transactions on Control Systems Technology, 15 802-823 (2007) [C1]
DOI10.1109/tcst.2007.903345
CitationsScopus - 474Web of Science - 363
2007Bhikkaji B, Ratnam MR, Fleming AJ, Moheimani SO, 'High-performance control of piezoelectric tube scanners', IEEE Transactions on Control Systems Technology, 15 853-866 (2007) [C1]
DOI10.1109/tcst.2007.902947
CitationsScopus - 103Web of Science - 75
Co-authorsAndrew Fleming
2007Moheimani SO, Devasia S, Elefrheriou E, 'Introduction to the special issue on dynamics and control of micro- and nanoscale systems (Editorial)', IEEE Transactions on Control Systems Technology, 15 799-801 (2007) [C3]
DOI10.1109/tcst.2007.902943
CitationsScopus - 16Web of Science - 9
2007Aphale SS, Fleming AJ, Moheimani SO, 'Integral control of collocated smart structures', Proceedings of SPIE, 6525 1-11 (2007) [C1]
DOI10.1117/12.715477
Co-authorsAndrew Fleming
2006Fleming AJ, Moheimani SO, 'Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners', IEEE Transactions on Control Systems Technology, 14 33-44 (2006) [C1]
DOI10.1109/TCST.2005.860511
CitationsScopus - 136Web of Science - 105
Co-authorsAndrew Fleming
2006Moheimani SO, Vautier BJG, Bhikkaji B, 'Experimental implementation of extended Multivariable PPF control on an active structure', IEEE Transactions on Control Systems Technology, 14 443-456 (2006) [C1]
DOI10.1109/TCST.2006.872532
CitationsScopus - 82Web of Science - 66
2006Fleming AJ, Behrens S, Moheimani SOR, 'Inertial vibration control using a shunted electromagnetic transducer (vol 11, pg 84, 2006)', IEEE-ASME TRANSACTIONS ON MECHATRONICS, 11 367-367 (2006)
DOI10.1109/TMECH.2006.878790Author URL
2006Fleming AJ, Moheimani SO, 'Inertial vibration control using a shunted electromagnetic transducer', IEEE-ASME Transactions on Mechatronics, 11 84-92 (2006) [C1]
DOI10.1109/TMECH.2005.863364
CitationsScopus - 12Web of Science - 13
Co-authorsAndrew Fleming
2006Niederberger D, Behrens S, Fleming AJ, Moheimani SO, Morari M, 'Adaptive electromagnetic shunt damping', IEEE-ASME Transactions on Mechatronics, 11 103-108 (2006) [C1]
DOI10.1109/TMECH.2005.859844
CitationsScopus - 17Web of Science - 17
Co-authorsAndrew Fleming
2005Fleming AJ, Moheimani SOR, 'Sensor-less vibration suppression and scan compensation for piezoelectric tube nanopositioners', 2005 44th IEEE Conference on Decision and Control & European Control Conference, Vols 1-8, 1162-1167 (2005)
Author URL
Co-authorsAndrew Fleming
2005Fleming AJ, Moheimani SO, 'Control oriented synthesis of high-performance piezoelectric shunt impedances for structural vibration control', IEEE Transactions on Control Systems Technology, 13 98-112 (2005) [C1]
DOI10.1109/TCST.2004.838547
CitationsScopus - 35Web of Science - 28
Co-authorsAndrew Fleming
2005Moheimani SO, Vautier BJG, 'Resonant control of structural vibration using charge-driven piezoelectric actuators', IEEE Transactions on Control Systems Technology, 13 1021-1035 (2005) [C1]
DOI10.1109/TCST.2005.857407
CitationsScopus - 70Web of Science - 52
2005Fleming AJ, Moheimani SO, Behrens S, 'Synthesis and implementation of sensor-less active shunt controllers for electromagnetically actuated systems', IEEE Transactions on Control Systems Technology, 13 246-261 (2005) [C1]
DOI10.1109/TCST.2004.839565
CitationsScopus - 10Web of Science - 8
Co-authorsAndrew Fleming
2005Moheimani SO, 'Introduction to the focused section on smart materials and structures (editorial)', IEEE-ASME Transactions on Mechatronics, 10 133-134 (2005) [C3]
CitationsScopus - 5Web of Science - 4
2005Behrens S, Fleming AJ, Moheimani SO, 'Passive vibration control via electromagnetic shunt damping', IEEE-Asme Transactions on Mechatronics, 10 118-122 (2005) [C1]
DOI10.1109/TMECH.2004.835341
CitationsScopus - 35Web of Science - 28
Co-authorsAndrew Fleming
2005Fleming AJ, Moheimani SO, 'A grounded-load charge amplifier for reducing hysteresis in piezoelectric tube scanners', Review of Scientific Instruments, 76 (2005) [C1]
DOI10.1063/1.1938952
CitationsScopus - 74Web of Science - 65
Co-authorsAndrew Fleming
2005Vautier BJG, Moheimani SO, 'Charge driven piezoelectric actuators for structural vibration control: Issues and implementation', Smart Materials and Structures, 14 575-586 (2005) [C1]
DOI10.1088/0964-1726/14/4/016
CitationsScopus - 21Web of Science - 17
2005Vautier BJG, Moheimani SOR, 'Multivariable lqg vibration control using charge-driven Piezoelectric actuators', IFAC Proceedings Volumes (IFAC-PapersOnline), 16 742-747 (2005)

Piezoelectric actuators are known to exhibit hysteresis when driven at relatively large voltages. in most situations this phenomenon is detrimental. Electric charge is known to na... [more]

Piezoelectric actuators are known to exhibit hysteresis when driven at relatively large voltages. in most situations this phenomenon is detrimental. Electric charge is known to naturally reduce the effects of hysteresis. The interaction of charge driven piezoceramics with flexible structures is analyzed and reveals that the dynamics of the system are different from the voltage driven case. A procedure for obtaining a charge driven plant model is documented, which can be used with standard control design tools. A multivariable LQG charge controller is designed to reject disturbance vibrations acting on a cantilever beam. Experimental results demonstrating the effectiveness of this method are included. Copyright © 2005 IFAC.

2004Moheimani SO, Halim D, 'A convex optimization approach to the mode acceleration problem', Automatica, 889-893 (2004) [C1]
DOI10.1016/j.automatica.2003.12.012
CitationsScopus - 3Web of Science - 2
2004Fleming AJ, Moheimani SOR, 'Optimal impedance design for piezoelectric vibration control', 2004 43RD IEEE CONFERENCE ON DECISION AND CONTROL (CDC), VOLS 1-5, 2596-2601 (2004)
DOI10.1109/CDC.2004.1428849Author URL
CitationsScopus - 3Web of Science - 3
Co-authorsAndrew Fleming
2004Moheimani SOR, Vautier BJG, 'Resonant control of structural vibration using charge-driven piezoelectric actuators', 2004 43RD IEEE CONFERENCE ON DECISION AND CONTROL (CDC), VOLS 1-5, 5368-5373 (2004)
DOI10.1109/CDC.2004.1429661Author URL
CitationsScopus - 2Web of Science - 2
2004Moheimani SO, Halim D, 'Reducing the effect of truncation error in spatial and pointwise models of resonant systems with damping', Mechanical Systems and Signal Processing, 291-315 (2004) [C1]
DOI10.1016/S0888-3270(03)00039-6
CitationsScopus - 6Web of Science - 6
2004Niederberger D, Fleming AJ, Moheimani SO, Morari M, 'Adaptive multi-mode resonant piezoelectric shunt dampening', Smart Materials and Structures, 1025-1035 (2004) [C1]
DOI10.1088/0964-1726/13/5/007
CitationsScopus - 58Web of Science - 51
Co-authorsAndrew Fleming
2004Moheimani SO, 'Emerging technologies for active noise and vibration control systems', Control Engineering Practice, 987-988 (2004) [C1]
DOI10.1016/j.conengprac.2004.02.002
CitationsWeb of Science - 1
2004Moheimani SO, Fleming AJ, 'Improved current and charge amplifiers for driving piezoelectric loads, and issues in signal processing design for synthesis of shunt damping circuits', Journal of Intelligent Material Systems and Structures, 15 77-92 (2004) [C1]
DOI10.1177/1045389X04039701
CitationsScopus - 36Web of Science - 32
Co-authorsAndrew Fleming
2004Moheimani SO, Behrens S, 'Multimode piezoelectric shunt dampening with a highly resonant impedance', IEEE Transactions on Control System Technology, 12 484-491 (2004) [C1]
DOI10.1109/TCST.2004.824318
CitationsScopus - 12Web of Science - 10
2004Moheimani SO, Fleming AJ, Behrens S, 'Dynamics, stability and control of multivariable piezoelectric shunts', IEEE ASME Transactions on Mechatronics, 9 87-99 (2004) [C1]
DOI10.1109/TMECH.2004.823882
CitationsScopus - 8Web of Science - 7
Co-authorsAndrew Fleming
2003Fleming AJ, Moheimani SO, 'Precision current and charge amplifiers for driving highly capacitive piezoelectric loads', Electronic Letters, 39 282-284 (2003) [C1]
DOI10.1049/el:20030235
CitationsScopus - 49Web of Science - 41
Co-authorsAndrew Fleming
2003Vautier BJG, Moheimani SO, 'Vibration reduction of resonant structures using charge controlled piezoelectric actuators', Electronics Letters, 39 1036-1038 (2003) [C1]
DOI10.1049/el:20030708
2003Behrens S, Moheimani SO, Fleming AJ, 'Multiple mode current flowing passive piezoelectric shunt controller', Journal of Sound and Vibration, 266 929-942 (2003) [C1]
DOI10.1016/S0022-460X(02)01380-9
CitationsScopus - 59Web of Science - 43
Co-authorsAndrew Fleming
2003Halim D, Moheimani SO, 'An optimization approach to optimal placement of collocated piezoelectric actuators and sensors on a thin plate', Mechatronics, 13 27-47 (2003) [C1]
DOI10.1016/S0957-4158(01)00079-4
CitationsScopus - 99Web of Science - 78
2003Behrens S, Fleming AJ, Moheimani SO, 'A broadband controller for shunt piezoelectric damping of structural vibration', Smart Materials and Structures, 12 18-28 (2003) [C1]
DOI10.1088/0964-1726/12/1/303
CitationsScopus - 82Web of Science - 70
Co-authorsAndrew Fleming
2003Fleming AJ, Moheimani SO, 'Adaptive piezoelectric shunt damping', Smart Materials and Structures, 12 36-48 (2003) [C1]
DOI10.1088/0964-1726/12/1/305
CitationsScopus - 7Web of Science - 42
Co-authorsAndrew Fleming
2003Fleming AJ, Behrens S, Moheimani SO, 'Reducing the inductance requirements of piezolelectric shunt dampening systems', Smart Materials and Structures, 12 57-64 (2003) [C1]
DOI10.1088/0964-1726/12/1/307
CitationsScopus - 41Web of Science - 32
Co-authorsAndrew Fleming
2003Moheimani SO, Fleming AJ, Behrens S, 'On the feedback structure of wideband piezoelectric shunt damping systems', Smart Materials and Structures, 12 49-56 (2003) [C1]
DOI10.1088/0964-1726/12/1/306
CitationsScopus - 36Web of Science - 30
Co-authorsAndrew Fleming
2003Moheimani SO, 'A survey of recent innovations in vibration damping and control using shunted piezoelectric transducers', IEEE Transactions on Control Systems Technology, 11 482-494 (2003) [C1]
DOI10.1109/TCST.2003.813371
CitationsScopus - 166Web of Science - 135
2003Fleming AJ, Moheimani SO, 'Spatial system identification of a simply supported beam and a trapezoidal cantilever plate', IEEE Transactions on control systems technology, 11 726-736 (2003) [C1]
DOI10.1109/TCST.2003.816415
CitationsScopus - 12Web of Science - 12
Co-authorsAndrew Fleming
2002Fleming A, Moheimani SOR, 'Spatial system identification of a simply supported beam and a trapezoidal cantilever plate.', PROCEEDINGS OF THE 41ST IEEE CONFERENCE ON DECISION AND CONTROL, VOLS 1-4, 4515-4520 (2002)
Author URL
Co-authorsAndrew Fleming
2002Pota HR, Moheimani SO, Smith M, 'Resonant controllers for smart structures', Smart Materials and Structures, 11 1-8 (2002) [C1]
DOI10.1088/0964-1726/11/1/301
CitationsScopus - 111Web of Science - 87
2002McKelvey T, Fleming AJ, Moheimani SO, 'Subspace based system identification for an acoustic enclosure', Journal of Vibration and Acoustics, 124 1-16 (2002) [C1]
Co-authorsAndrew Fleming
2002Halim D, Moheimani SO, 'Spatial H2 Control of a Piezoelectric Laminate Beam: Experimental Implementation', IEEE Transactions on Control Systems Technology, 10 533 (2002) [C1]
DOI10.1109/TCST.2002.1014673
CitationsScopus - 43Web of Science - 41
2002Halim D, Moheimani SO, 'Experimental Implementation of Spatial H- Control on a Piezoelectric-Laminate Beam', IEEE/ASME Transactions on Mechatronics, 7 346-356 (2002) [C1]
CitationsScopus - 34Web of Science - 32
2002De Dona JA, Goodwin GC, Moheimani SO, 'Combining switching, over-saturation and scaling to optimise control performance in the presence of model uncertainty and input saturation', Automatica, 38 1153-1162 (2002) [C1]
CitationsScopus - 18Web of Science - 13
Co-authorsGraham Goodwin, Jose Dedona
2002Moheimani SO, Heath WP, 'Model correction for a class of spatio-temporal systems', Automatica, 38 147-155 (2002) [C1]
DOI10.1016/S0005-1098(01)00178-9
2001Moheimani SO, Fleming AJ, Behrens S, 'Highly resonant controller for multimode piezoelectric shunt damping', Electronic Letters, 37 No 25 1505-1506 (2001) [C1]
CitationsScopus - 7Web of Science - 6
Co-authorsAndrew Fleming
2001Fleming AJ, Behrens S, Moheimani SOR, 'Innovations in piezoelectric shunt damping', SMART STRUCTURES AND DEVICES, 4235 89-101 (2001)
DOI10.1117/12.420891Author URL
CitationsScopus - 2Web of Science - 2
Co-authorsAndrew Fleming
2001Behrens S, Fleming AJ, Moheimani SOR, 'New method for multiple-mode shunt damping of structural vibration using a single piezoelectric transducer', SMART STRUCTURES AND MATERIALS 2001: DAMPING AND ISOLATION, 4331 239-250 (2001)
DOI10.1117/12.432707Author URL
CitationsScopus - 32Web of Science - 28
Co-authorsAndrew Fleming
2001Moheimani SO, 'Model Correction for Sampled-Data Models of Structures', Journal of Guidance Control and Dynamics, 24, No. 3 634-637 (2001) [C1]
CitationsScopus - 8Web of Science - 3
2001Moheimani SOR, Goodwin GC, 'Guest editorial - Introduction to the special issue on dynamics and control of smart structures', IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 9 3-4 (2001)
Author URL
CitationsWeb of Science - 38
Co-authorsGraham Goodwin
2001Halim D, Moheimani SO, 'Spatial Resonant Control of Flexible Structures - Application to a Piezoelectric Laminate Beam', IEEE Transactions on Control Systems Technology, 9 No. 1 37-53 (2001) [C1]
DOI10.1109/87.896744
CitationsScopus - 89Web of Science - 69
2001Moheimani SO, Goodwin GC, 'Introduction to the Special Issue on Dynamics and Control Smart Structures', IEEE Transactions on Control Systems Technology, Vol 9, No. 1 3 & 4 (2001) [C3]
Co-authorsGraham Goodwin
2000Moheimani SO, 'Minimizing the effect of out-of-bandwith dynamics in the models of reverberant systems that arise in modal analysis: implications on spatial H Control', Automatica, 36 1023-1031 (2000) [C1]
2000Fleming AJ, Behrens S, Moheimani SO, 'Synthetic impedance for implementation of piezoelectric shunt-damping circuits', Electronics Letters, 36, no 18 1525-1526 (2000) [C1]
DOI10.1049/el:20001083
CitationsScopus - 82Web of Science - 77
Co-authorsAndrew Fleming
2000Moheimani SO, Savkin AV, Petersen IR, 'Synthesis of minimax optimal controllers for uncertain time-delay systems with structured uncertainty', International Journal of Systems Science, 31, No 2 137-147 (2000) [C1]
CitationsScopus - 11Web of Science - 12
2000Moheimani SO, 'Minimizing the Effect of Out of Bandwith Modes in Truncated Structure Models', Journal of Dynamic Systems, Measurement, and Control, 122 237-239 (2000) [C1]
DOI10.1016/S0005-1098(00)00012-1
CitationsScopus - 19Web of Science - 20
2000Moheimani SOR, Heath WP, 'Model correction for a class of spatio-temporal systems', PROCEEDINGS OF THE 2000 AMERICAN CONTROL CONFERENCE, VOLS 1-6, 3768-3772 (2000)
Author URL
CitationsScopus - 2Web of Science - 7
2000Moheimani SOR, Clark RL, 'Minimizing the truncation error in assumed modes models of structures', Journal of Vibration and Acoustics, Transactions of the ASME, 122 331-335 (2000)

The assumed modes approach is a widely used technique in modeling of distributed systems. Such models often consist of a large number of modes. For controller design purposes thes... [more]

The assumed modes approach is a widely used technique in modeling of distributed systems. Such models often consist of a large number of modes. For controller design purposes these models are simplified by truncating the modes that lie out of the bandwidth of interest. Truncation can alter zeros of the system. This paper presents a method of minimizing the truncation error by adding a second order term to the truncated model. This extra term is determined such that the in-bandwidth error is minimized in an optimal H2 sense. The technique is extended to multivariable systems.

CitationsScopus - 8
2000Moheimani SO, 'Experimental Verification of the Corrected Transfer Funtion of a Piezoelectric Laminate Beam', IEEE Transactions on Control Systems Technology, 8, No 4 660-666 (2000) [C1]
CitationsScopus - 48Web of Science - 41
2000McKelvey T, Fleming A, Moheimani SOR, 'Subspace based system identification for an acoustic enclosure', PROCEEDINGS OF THE 2000 IEEE INTERNATIONAL CONFERENCE ON CONTROL APPLICATIONS, 255-260 (2000)
DOI10.1109/CCA.2000.897433Author URL
CitationsScopus - 1
1999Moheimani SO, Pota HR, Petersen IR, 'Spatial Balanced Model Reduction for Flexible Structures', Automatica, Vol 35 269-277 (1999) [C1]
CitationsScopus - 21Web of Science - 21
1999Moheimani SO, Petersen IR, Pota HR, 'Broadband Disturbance Attenuation over an Entire Beam', Journal of Sound and Vibration, 227 No. 4 807-832 (1999) [C1]
CitationsScopus - 19Web of Science - 18
1999Savkin AV, Petersen IR, Moheimani SO, 'Model Validation and State Estimation for Uncertain Continuous-Time Systems with Missing Discrete-Continuous Time Data', Computers and Electrical Engineering, 25, No. 1 29-43 (1999) [C1]
CitationsScopus - 52Web of Science - 39
1999De Dona JA, Moheimani SO, Goodwin GC, Feuer A, 'Robust Hybrid Control Incorporating Over-Saturation', Systems & Control Letters, 38 179-185 (1999) [C1]
CitationsScopus - 17Web of Science - 12
Co-authorsJose Dedona, Graham Goodwin
1999Reza Moheimani SO, 'Minimizing the effect of out of bandwidth dynamics in the models of reverberant systems that arise in modal analysis: implications on spatial H8 control', Proceedings of the IEEE Conference on Decision and Control, 2 1089-1094 (1999)

The assumed modes modelling of structures and acoustic systems results in infinite-dimensional models. For control design purposes, these models are simplified by removing higher ... [more]

The assumed modes modelling of structures and acoustic systems results in infinite-dimensional models. For control design purposes, these models are simplified by removing higher frequency modes which lie out of the bandwidth of interest. Truncation can considerably perturb the zeros of the truncated model. This paper suggests a method of minimizing the effect of removed higher order modes on the spatial low-frequency dynamics of the truncated model by adding a spatial zero frequency term to the low order model of the system. The paper also studies implications of this approach on Spatial H8 Control of reverberant systems.

1999Moheimani SOR, 'Experimental verification of the reduced order transfer function of a piezoelectric laminate beam', Proceedings of the IEEE Conference on Decision and Control, 3 2587-2592 (1999)

Piezoelectric materials are finding increasing applications in active vibration control of structures. A widely used modelling technique for piezoelectric laminates is the assumed... [more]

Piezoelectric materials are finding increasing applications in active vibration control of structures. A widely used modelling technique for piezoelectric laminates is the assumed modes method which results in an infinite-dimensional model of the composite structure. For control design purposes, such a model is simplified by removing higher frequency modes which lie out of the bandwidth of interest. Truncation can considerably perturb the in-band zeros of the truncated model. This paper suggests a method of minimizing the effect of the removed higher order modes on the low frequency dynamics of the truncated model of a piezoelectric laminated beam by adding a zero frequency term to the low order model of the laminate. Simulations and experimental results are presented.

CitationsScopus - 1
1999Esfahani SH, Moheimani SO, Petersen IR, 'An LMI Approach to Sub-Optimal Guaranteed Cost Control for Uncertain Time-Delay Systems', IEE Proceedings - Control Theory and Applications, 145, No. 6 491-498 (1999) [C1]
1998Esfahani SH, Moheimani SOR, Petersen IR, 'LMI approach to suboptimal guaranteed cost control for uncertain time-delay systems', IEE PROCEEDINGS-CONTROL THEORY AND APPLICATIONS, 145 491-498 (1998)
DOI10.1049/ip-cta:19982405Author URL
CitationsScopus - 54Web of Science - 50
1998Moheimani SO, Petersen IR, 'Guaranteed cost control of uncertain systems with a time-multiplied quadratic cost function: an approach based on linear matrix inequalities', Automatica, 34 654-654 (1998) [C1]
CitationsScopus - 24Web of Science - 15
1998Moheimani SO, Savkin V, Petersen IR, 'Robust filtering, prediction, smoothing, and observability of uncertain systems', IEEE Transactions on Circuits and Systems - 1: Fundamental Theory and Applications., 45, No 4 446-457 (1998) [C1]
CitationsScopus - 40Web of Science - 34
1997Moheimani R, Petersen IP, 'Optimal quadratic guaranteed cost control of a class of uncertain time-delay systems', I E T Control Theory and Applications, 144 183-188 (1997) [C1]
CitationsScopus - 117Web of Science - 106
1997Moheimani SOR, Savkin AV, Petersen IR, 'Minimax optimal control of discrete-time uncertain systems with structured uncertainty', DYNAMICS AND CONTROL, 7 5-24 (1997)
DOI10.1023/A:1008259430677Author URL
CitationsScopus - 10Web of Science - 9
1997Moheimani R, Savkin AV, Petersen IR, 'Minimax Optimal Control of Discrete-Time', Dynamics and Control, 7 5-24 (1997) [C1]
1996Moheimani R, Petersen IR, 'Optimal guaranteed cost control of uncertain systems via static and dynamic output feedback', Automatica, 32 575-579 (1996) [C1]
CitationsScopus - 48Web of Science - 26
1996Moheimani R, Savkin AV, Petersen IR, 'Robust observability for a class of time-varying discrete-time uncertain systems', Systems and Control Letters, 27 261-266 (1996) [C1]
CitationsScopus - 11Web of Science - 12
1996Moheimani R, Petersen IR, 'Quadratic guaranteed cost control with robust pole placement in a disk', I E T Control Theory & Applications, 143 37-43 (1996) [C1]
CitationsScopus - 26Web of Science - 22
1996Moheimani SOR, Savkin AV, Petersen IR, 'The robust prediction problem for a class of uncertain systems', ISCAS 96: 1996 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS - CIRCUITS AND SYSTEMS CONNECTING THE WORLD, VOL 3, 465-468 (1996)
Author URL
1995Moheimani R, Savkin AV, Petersen IR, 'A connection between S{{cal {H}_{infty}}S control and the absolute stabilizability of discrete-time uncertain systems', Automatica, 31 1193-1195 (1995) [C1]
CitationsScopus - 11Web of Science - 11
Show 185 more journal articles

Conference (170 outputs)

YearCitationAltmetricsLink
2015Esfahani SH, Moheimani SOR, Petersen IR, 'An LMI approach to sub-optimal guaranteed cost control for uncertain time-delay systems', ECC 1997 - European Control Conference (2015)

This paper presents results on the design of robust memoryless state feedback controller for uncertain time-delay systems with norm bounded uncertainty. It is proved that quadrati... [more]

This paper presents results on the design of robust memoryless state feedback controller for uncertain time-delay systems with norm bounded uncertainty. It is proved that quadratic stabilization of uncertain time-delay systems is necessary and sufficient for the feasibility of an LMI problem. The robust state feedback controller can be constructed using the corresponding feasible solution of the LMI problem. A procedure is given to select a suitable state feedback controller that is also sub-optimal in the sense of minimizing a bound on an integral quadratic performance index.

2014Karvinen KS, Moheimani SOR, 'The control of higher modes in atomic force microscopy', Proceedings of the 2014 International Conference on Nanoscience and Nanotechnology, ICONN 2014 (2014) [E3]

Strong nonlinear interactions between the cantilever tip and sample may result in coupling of the cantilever modes, which may result in image artefacts. Such observations have bee... [more]

Strong nonlinear interactions between the cantilever tip and sample may result in coupling of the cantilever modes, which may result in image artefacts. Such observations have been made in liquid AFM [1] and contact mode AFM [2, 3]. There are currently very few solutions to address this problem. While the displacement sensor can be calibrated to ignore contributions from the higher modes, this approach lacks robustness [4]. To mitigate these effects, we propose the application of modulated-demodulated control to suppress the higher modes. The modulated-demodulated control technique is advantageous as it reduces the bandwidth requirements of the baseband controller, simplifying the implementation of high-bandwidth controllers [5].

DOI10.1109/ICONN.2014.6965263
2014Bazaei A, Mohammadi A, Reza Moheimani SO, 'Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes', 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), Besancon, France (2014) [E1]
DOI10.1109/AIM.2014.6878289
Co-authorsAli Bazaei
2014Bazaei A, Maroufi M, Mohammadi A, Reza Moheimani SO, 'Development of a MEMS position transducer using bulk piezoresistivity of suspensions', 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics AIM, Besancon, France (2014) [E1]
DOI10.1109/AIM.2014.6878290
Co-authorsAli Bazaei
2014Moore SI, Moheimani SOR, 'Self-sensing electrostatic drive in a MEMS nanopositioner for the application of vibration control', 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM, Besancon, France (2014) [E1]
DOI10.1109/AIM.2014.6878288
2014Mohammadi A, Moheimani SOR, Yuce MR, 'SNR improvement in MEMS electrothermal displacement sensors', 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM, Besancon, France (2014) [E1]
DOI10.1109/AIM.2014.6878138
2014Wadikhaye SP, Yong YK, Moheimani SOR, 'Design and characterisation of a serial-kinematic nanopositioner for high-speed AFM', IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM, Besancon, France (2014) [E1]
DOI10.1109/AIM.2014.6878080
Co-authorsYuenkuan Yong
2014Sanjeevini S, Bhikkaji B, Moheimani SOR, 'Stability analysis of switched systems with 'mixed'-negative imaginary property', IFAC Proceedings Volumes (IFAC-PapersOnline) (2014) [E1]

This paper discusses the stability of feedback systems in which both plant and controller are switched. Switched systems considered here have all their subsystems satisfying the '... [more]

This paper discusses the stability of feedback systems in which both plant and controller are switched. Switched systems considered here have all their subsystems satisfying the 'mixed'-negative imaginary property. A definition for dissipativity (for switched systems) is proposed, and dissipative switched systems are shown to be stable (under certain conditions). Switched systems with 'mixed'-negative imaginary property are shown to be dissipative and conditions for stability are derived. As an illustration of the results, a switched controller is designed for a nanopositioning stage, which has a 'mixed'-negative imaginary frequency response function. Simulations show that the closed loop is stable and the designed controller damps the resonances satisfactorily.

2014Fairbairn MW, Wadikhaye SP, Moheimani SOR, 'Sensorless damping control of a high speed flexure guided nanopositioner', IFAC Proceedings Volumes (IFAC-PapersOnline) (2014) [E1]

The scan speed of the Atomic Force Microscope (AFM) is limited by the highly resonant nature of the nanopositioner which scans the sample relative to the probe tip. Feedback contr... [more]

The scan speed of the Atomic Force Microscope (AFM) is limited by the highly resonant nature of the nanopositioner which scans the sample relative to the probe tip. Feedback control may be used to dampen the resonance; however this requires external displacement sensors which may introduce high frequency noise into the feedback loop. In this work an active piezoelectric shunt control system, which requires no external feedback sensors, is designed to damp the resonance of a high speed flexure guided nanopositioner. The shunt impedance is designed in such a way that the closed loop transfer function from applied voltage to actuator displacement is equivalent to that of a displacement feedback system using a Positive Position Feedback (PPF) controller. This impedance design is an improvement over a passive impedance in that higher damping of the resonance is achievable. AFM images of a test sample were obtained to demonstrate the reduction of image artifacts when this control technique is applied.

2014Ruppert MG, Moheimani SOR, 'Novel reciprocal self-sensing techniques for tapping-mode atomic force microscopy', IFAC Proceedings Volumes (IFAC-PapersOnline) (2014) [E1]

We evaluate two novel reciprocal self-sensing methods for tapping-mode atomic force microscopy (TM-AFM) utilizing charge measurement and charge actuation, respectively. A microcan... [more]

We evaluate two novel reciprocal self-sensing methods for tapping-mode atomic force microscopy (TM-AFM) utilizing charge measurement and charge actuation, respectively. A microcantilever, which can be batch fabricated through a standard microelectromechanical system (MEMS) process, is coated with a single piezoelectric layer and simultaneously used for actuation and deflection sensing. The setup enables the elimination of the optical beam deflection technique which is commonly used to measure the cantilever oscillation amplitude. The voltage to charge and charge to voltage transfer functions reveal a high amount of capacitive feedthrough which degrades the dynamic range of the sensors significantly. A feedforward control technique is employed to cancel the feedthrough and increase the dynamic range from less than 1dB to approximately 30 dB. Experiments show that the conditioned self-sensing schemes achieve an excellent signal-to-noise ratio and can therefore be used to provide the feedback signal for TM-AFM imaging.

2014Moore SI, Moheimani SOR, 'Simultaneous actuation and sensing for electrostatic drives in MEMS using frequency modulated capacitive sensing', IFAC Proceedings Volumes (IFAC-PapersOnline) (2014) [E1]

This paper presents a displacement sensing technique that can be integrated into a microfabricated microelectromechanical system (MEMS) device. This sensor determines displacement... [more]

This paper presents a displacement sensing technique that can be integrated into a microfabricated microelectromechanical system (MEMS) device. This sensor determines displacement by measuring the capacitance of a MEMS electrostatic drive, as the capacitance is a function of the displacement. The electrostatic drive is incorporated into an LC oscillator whose frequency varies with the capacitance. A lock-in amplifier is used to extract the frequency signal. The sensitivity of the sensor was -1.153 V µm-1 and exhibited no dynamics up to the 1.2 kHz bandwidth of the MEMS device it was implemented in. The electrostatic drive in this technique is used for both actuation and sensing. This effectively increases the transduction efficiency of both the actuator and sensor as more space on the die can be dedicated to the one drive. Additionally, the scheme allows for one terminal of the drive to be grounded. Thus, this scheme can be used on MEMS devices with more than one drive connected to a common mechanical structure which is electrically grounded.

2014Fowler AG, Maroufi M, Bazaei A, Moheimani SOR, 'MEMS Nanopositioner for Lissajous-Scan Atomic Force Microscopy', ASME Proceedings: Dynamic Systems and Control Conference, San Antonio, Texas (2014) [E1]
DOI10.1115/DSCC2014-6044
Co-authorsAli Bazaei
2013Fowler AG, Moheimani SOR, Behrens S, 'A MEMS electromagnetic energy harvester using ultrasonic excitation', 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics: AIM 2013, Wollongong (2013) [E1]
DOI10.1109/AIM.2013.6584113
2013Moore SI, Moheimani SOR, 'MEMS Based Oscillator Incorporating A Displacement Sensor', 3rd Australian Control Conference (AUCC), Perth, AUSTRALIA (2013) [E1]
DOI10.1109/AUCC.2013.6697263Author URL
2013Ruppert MG, Fairbairn MW, Moheimani SOR, 'Multi-Mode Resonant Control of a Microcantilever for Atomic Force Microscopy', 2013 IEEE/ASME International Conference On Advanced Intelligent Mechatronics (AIM): Mechatronics For Human Wellbeing, Wollongong, Australia (2013) [E1]
Author URL
CitationsScopus - 1Web of Science - 1
2013Wadikhaye SP, Yong YK, Moheimani SOR, 'Nanopositioner Design using Tapered Flexures: A Parametric Study', 2013 IEEE/ASME International Conference On Advanced Intelligent Mechatronics (AIM): Mechatronics For Human Wellbeing, Wollongong, Australia (2013) [E1]
DOI10.1109/AIM.2013.6584201Author URL
CitationsScopus - 2Web of Science - 1
Co-authorsYuenkuan Yong
2013Maroufi M, Moheimani SOR, 'Design, Fabrication and Characterization of a High-Bandwidth 2DOF MEMS Nanopositioner', 2013 IEEE/ASME International Conference On Advanced Intelligent Mechatronics (AIM): Mechatronics For Human Wellbeing, Wollongong, AUSTRALIA (2013) [E1]
Author URL
CitationsScopus - 4Web of Science - 6
2013Piriyanont B, Moheimani SOR, 'Design, Modeling, and Characterization of a MEMS Micro-gripper with an Integrated Electrothermal Force Sensor', 2013 IEEE/ASME International Conference On Advanced Intelligent Mechatronics (Aim): Mechatronics For Human Wellbeing, Wollongong, Australia (2013) [E1]
Author URL
CitationsScopus - 1
2013Bazaei A, Fowler AG, Moheimani SOR, 'Nonlinear analysis of electrothermal position sensors with contoured heaters', IEEE SENSORS 2013 - Proceedings (2013) [E2]

For electrothermal MEMS position sensors, we introduce a novel analytical model capturing the nonuniform distribution of temperature as well as the nonlinear temperature profile o... [more]

For electrothermal MEMS position sensors, we introduce a novel analytical model capturing the nonuniform distribution of temperature as well as the nonlinear temperature profile of resistivity. The proposed model also includes the effects of contoured beam heaters and the nonuniform proximity of the heatsink, which changes with heatsink position and is differentially transduced into output voltage. The model predicts the experimental I-V data and the sensor output accurately. It also reveals a considerable improvement in the linearity of the sensor response when the beam profiles are appropriately shaped to yield a more uniform temperature distribution. The shaped sensor is compared with conventional electrothermal sensors with uniform beam cross sections under two different conditions, equal bias voltages and equal average temperatures, where improved linearity is achieved in both cases. © 2013 IEEE.

DOI10.1109/ICSENS.2013.6688349
Co-authorsAli Bazaei
2013Bazaei A, Moheimani SOR, 'Realization of a class of compensators by modulated-demodulated structures with application in tracking of biased sinusoids', Proceedings of the American Control Conference, Washington, DC (2013) [E1]
Co-authorsAli Bazaei
2013Fairbairn MW, Moheimani SOR, 'A new approach to active Q control of an atomic force microscope micro-cantilever operating in tapping mode', Proceedings of the 6th IFAC Symposium on Mechatronic Systems, Hangzhou, China (2013) [E1]
DOI10.3182/20130410-3-CN-2034.00016
2013Karvinen KS, Moheimani SOR, 'Modulated-demodulated Q control of an atomic force microscope microcantilever', Proceedings of the 6th IFAC Symposium on Mechatronic Systems, Hangzhou, China (2013) [E1]
DOI10.3182/20130410-3-CN-2034.00093
CitationsScopus - 1
2013Moore S, Moheimani SOR, 'MEMS resonator with displacement sensor based on electro-thermal principles', Proceedings of the 6th IFAC Symposium on Mechatronic Systems, Hangzhou, China (2013) [E1]
DOI10.3182/20130410-3-CN-2034.00116
2013Fowler AG, Moheimani SOR, Rakotondrabe M, 'Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation', Proceedings of the 6th IFAC Symposium on Mechatronic Systems, Zhejiang University, Hangzhou, China (2013) [E1]
DOI10.3182/20130410-3-CN-2034.00115
2013Yong YK, Fowler AG, Mohammadi A, Moheimani SOR, 'Control of a MEMS nanopositioner for atomic force microscopy', Proceedings of the 6th IFAC Symposium on Mechatronic Systems, 2013, Hangzhou, China (2013) [E1]
DOI10.3182/20130410-3-CN-2034.00038
Co-authorsYuenkuan Yong
2013Karvinen KS, Moheimani SOR, 'Analysis and Application of Modulated-Demodulated Control', 2013 3rd Australian Control Conference (AUCC), Perth, AUSTRALIA (2013) [E1]
DOI10.1109/AUCC.2013.6697317Author URL
2013Fairbairn MW, Mueller P, Moheimani SOR, 'Active Piezoelectric Shunt Control of an Atomic Force Microscope Micro-Cantilever', 2013 3rd Australian Control Conference (AUCC), Perth, Australia (2013) [E1]
DOI10.1109/AUCC.2013.6697282Author URL
2013Fowler AG, Moheimani SOR, Behrens S, 'A 3-DOF SOI MEMS ultrasonic energy harvester for implanted devices', Journal of Physics: Conference Series, Imperial Coll London, London, ENGLAND (2013) [E1]
DOI10.1088/1742-6596/476/1/012002Author URL
CitationsScopus - 1
2013Piriyanont B, Moheimani SOR, Bazaei A, 'Design and Control of a MEMS Micro-gripper with Integrated Electro-thermal Force Sensor', 2013 3rd Australian Control Conference (AUCC), Perth, Australia (2013) [E1]
DOI10.1109/AUCC.2013.6697320Author URL
CitationsScopus - 1
Co-authorsAli Bazaei
2013Yong YK, Bazaei A, Moheimani SOR, 'Control of a High-Speed Nanopositioner for Lissajous-scan Video-rate AFM', 2013 3rd Australian Control Conference (AUCC), Perth, AUSTRALIA (2013) [E1]
DOI10.1109/AUCC.2013.6697268Author URL
Co-authorsYuenkuan Yong, Ali Bazaei
2012Bazaei A, Fowler AG, Moheimani SO, 'Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters', 11th IEEE Sensors 2012. Proceedings, Taipei, Taiwan (2012) [E1]
Co-authorsAli Bazaei
2012Fowler AG, Moheimani SO, Behrens S, 'A 3-DoF MEMS ultrasonic energy harvester', 11th IEEE Sensors 2012. Proceedings, Taipei, Taiwan (2012) [E1]
2012Rakotondrabe M, Fowler AG, Moheimani SO, 'Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing', 11th IEEE Sensors 2012. Proceedings, Taipei, Taiwan (2012) [E1]
CitationsWeb of Science - 2
2012Laskovski AN, Yuce MR, Moheimani SO, 'Ultra low frequency FM sensing of piezoelectric strain voltage', 11th IEEE Sensors 2012. Proceedings, Taipei, Taiwan (2012) [E1]
2012Mohammadi A, Yuce MR, Moheimani SO, 'A readout circuit implementation to reduce the flicker noise in MEMS electrothermal sensors', 2012 19th IEEE International Conference on Electronics, Circuits, and Systems, ICECS 2012, Seville, Spain (2012) [E1]
2012Yong YK, Moheimani SO, 'A Z-scanner design for high-speed scanning probe microscopy', 2012 IEEE International Conference on Robotics and Automation, Saint Paul, MN (2012) [E1]
CitationsScopus - 3Web of Science - 2
Co-authorsYuenkuan Yong
2012Wadikhaye S, Bhikkaji B, Moheimani SO, Yong YK, 'Analog implementation of a damping and tracking controller for a high-speed X-Y nanopositioner', 2012 American Control Conference, Montreal, Canada (2012) [E1]
CitationsScopus - 1
Co-authorsYuenkuan Yong
2012Fairbairn MW, Moheimani SO, 'Minimizing probe loss in tapping mode atomic force microscopy using a switched gain resonant controller', Australian Control Conference Proceedings 2012, Sydney, Australia (2012) [E1]
2012Bazaei A, Moheimani SO, 'Improving transient performance of signal transformation approach', Proceedings of the 51st IEEE Conference on Decision and Control, Hawaii, USA (2012) [E1]
Co-authorsAli Bazaei
2012Fairbairn MW, Moheimani SO, 'Quality factor enhancement of an atomic force microscope micro-cantilever using piezoelectric shunt control', 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) Proceedings, Kaohsiung, Taiwan (2012) [E1]
CitationsScopus - 3Web of Science - 3
2012Yong YK, Bazaei A, Moheimani SO, Allgower F, 'Design and control of a novel non-raster scan pattern for fast scanning probe microscopy', 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) Proceedings, Kaohsiung, Taiwan (2012) [E1]
Co-authorsAli Bazaei, Yuenkuan Yong
2011Fairbairn MW, Moheimani SO, Fleming AJ, 'Passive piezoelectric shunt control of an atomic force microscope microcantilever', 2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics: AIM2011, Budapest (2011) [E1]
DOI10.1109/AIM.2011.6026982
CitationsScopus - 1
Co-authorsAndrew Fleming
2011Yong YK, Moheimani SO, Petersen I, 'A non-raster scan method for high-speed SPM', 2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary (2011) [E3]
Co-authorsYuenkuan Yong
2011Yong YK, Fleming AJ, Moheimani SO, 'Vibration and tracking control of a flexure-guided nanopositioner using a Piezoelectric strain sensor', First International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-Nano 2011), Changchun, China (2011) [E2]
Co-authorsYuenkuan Yong, Andrew Fleming
2011Fairbairn MW, Moheimani SO, Fleming AJ, 'Improving the scan rate and image quality in tapping mode atomic force microscopy with piezoelectric shunt control', Proceedings of the 2011 Australian Control Conference, AUCC 2011, Melbourne, Vic (2011) [E1]
CitationsScopus - 2
Co-authorsAndrew Fleming
2011Zhu Y, Bazaei A, Moheimani SO, Yuce MR, 'Design, prototyping, modeling and control of a MEMS nanopositioning stage', 2011 American Control Conference, San Francisco, CA (2011) [E1]
CitationsScopus - 4
Co-authorsAli Bazaei
2011Yong YK, Bhikkaji B, Moheimani SO, 'Analog control of a high-speed atomic force microscope scanner', 2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM2011), Budapest, Hungary (2011) [E1]
DOI10.1109/AIM.2011.6027103
CitationsScopus - 3Web of Science - 3
Co-authorsYuenkuan Yong
2011Wadikhaye S, Yong YK, Moheimani SO, 'A novel serial-kinematic AFM scanner: Design and characterization', Proceedings IECON 2011 - 37th Annual Conference on IEEE Industrial Electronics Society, Melbourne, Australia (2011) [E1]
DOI10.1109/IECON.2011.6119287
CitationsScopus - 1
Co-authorsYuenkuan Yong
2011Mohammadi A, Yuce MR, Moheimani SO, 'Dealing with 1/f Noise in MEMS electrothermal sensing', Proceedings. IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society, Melbourne, Vic (2011) [E1]
DOI10.1109/IECON.2011.6119974
CitationsScopus - 2Web of Science - 2
2011Bhikkaji B, Yong YK, Mahmood IA-T, Moheimani SO, 'Multivariable control designs for Piezoelectric tubes', Proceedings of the 18th IFAC World Congress, 2011, Milano, Italy (2011) [E1]
DOI10.3182/20110828-6-it-1002.01745
CitationsScopus - 5
Co-authorsYuenkuan Yong
2010Mahmood IA-T, Moheimani SO, 'Spiral-scan atomic force microscopy: A constant linear velocity approach', Proceedings of the 10th IEEE International Conference on Nanotechnology, Seoul, Korea (2010) [E2]
DOI10.1109/NANO.2010.5698063
CitationsScopus - 1
2010Yong YK, Ahmed B, Moheimani SO, 'A 12-electrode piezoelectric tube scanner for fast atomic force microscopy', 2010 American Control Conference, ACC 2010, Baltimore, MD (2010) [E1]
Co-authorsYuenkuan Yong
2010Mahmood IA-T, Moheimani SO, 'Spiral scanning: An alternative to conventional raster scanning in high-speed scanning probe microscopes', 2010 American Control Conference, ACC 2010, Baltimore, MD (2010) [E1]
CitationsWeb of Science - 1
2010Bazaei A, Moheimani SO, Sebastian A, 'Stability of signal transformation method for triangular waveform tracking', 2010 49th IEEE Conference on Decision and Control, CDC 2010, Atlantic, GA (2010) [E1]
DOI10.1109/CDC.2010.5717633
Co-authorsAli Bazaei
2010Yong YK, Moheimani SO, 'A compact XYZ scanner for fast atomic force microscopy in constant force contact mode', 2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Proceedings, Montreal, Canada (2010) [E1]
DOI10.1109/AIM.2010.5695880
CitationsScopus - 4
Co-authorsYuenkuan Yong
2010Zhu Y, Moheimani SO, Yuce MR, 'A MEMS nanopositioner with thermal actuator and on-chip thermal sensor', 2010 IEEE Sensors, Kona, HI (2010) [E2]
DOI10.1109/ICSENS.2010.5689877
2010Ji L, Zhu Y, Moheimani SO, Yuce MR, 'A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor', Sensors, 2010 IEEE: Proceedings of the Ninth IEEE Sensors Conference 2010, Waikoloa, Hawaii (2010) [E2]
DOI10.1109/ICSENS.2010.5690373
CitationsScopus - 7Web of Science - 6
2010Bazaei A, Yong YK, Moheimani SO, Sebastian A, 'Tracking control of a novel AFM scanner using signal transformation method', Preprints of the 5th IFAC Symposium on Mechatronic Systems, Cambridge, Massachusetts (2010) [E1]
CitationsScopus - 1
Co-authorsAli Bazaei, Yuenkuan Yong
2010Bazaei A, Yong YK, Moheimani SOR, Sebastian A, 'Tracking Control of a Novel AFM Scanner using Signal Transformation Method', IEEE Transactions on Control Systems Technology, Marriott Boston Cambridge, United States of America (2010) [C1]
DOI10.1109/TCST.2011.2114347
Co-authorsAli Bazaei, Yuenkuan Yong
2009Aphale SS, Ferreira A, Moheimani SO, 'Loop-shaping H [infinity]-control of a 2-DOF piezoelectric-stack actuated platform for nanoscale positioning', Proceedings - IEEE International Conference on Robotics and Automation, Kobe, Japan (2009) [E1]
DOI10.1109/robot.2009.5152233
CitationsScopus - 2
2009Bhikkaji B, Moheimani SO, 'Fast scanning using piezoelectric tube nanopositioners: A negative imaginary approach', 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Proceedings, Singapore (2009) [E1]
DOI10.1109/AIM.2009.5230001
CitationsScopus - 21Web of Science - 8
2009Yong YK, Moheimani SO, 'Vibration control of a novel tube scanner using piezoelectric strain-induced voltage', 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Singapore (2009) [E1]
DOI10.1109/aim.2009.5229728
CitationsScopus - 4
Co-authorsYuenkuan Yong
2009Pereira E, Aphale SS, Feliu V, Moheimani SO, 'A hybrid control strategy for vibration damping and precise tip-positioning of a single-link flexible manipulator', 5th IEEE International Conference on Mechatronics, Malaga, Spain (2009) [E1]
DOI10.1109/icmech.2009.4957128
2009Reza Moheimani SO, Yong YK, 'A new piezoelectric tube scanner for simultaneous sensing and actuation', Proceedings of the American Control Conference, St Louis, MO (2009) [E1]
DOI10.1109/ACC.2009.5160032
Co-authorsYuenkuan Yong
2009Zhu Y, Moheimani SO, Yuce MR, 'A 2-DOF wideband electrostatic transducer for energy harvesting and implantable applications', 2009 IEEE Sensors Conference, Christchurch, NZ (2009) [E2]
DOI10.1109/icsens.2009.5398476
CitationsScopus - 4Web of Science - 6
2009Zhu Y, Yuce MR, Moheimani SO, 'A low-loss MEMS tunable capacitor with movable dielectric', 2009 IEEE Sensors Conference, Christchurch, NZ (2009) [E2]
DOI10.1109/icsens.2009.5398334
CitationsScopus - 4Web of Science - 1
2009Fleming AJ, Aphale SS, Moheimani SO, 'A new robust damping and tracking controller for SPM positioning stages', Proceedings of the American Control Conference, St Louis, MO (2009) [E1]
DOI10.1109/acc.2009.5159934
CitationsScopus - 3Web of Science - 3
Co-authorsAndrew Fleming
2009Mahmood IA-T, Moheimani SO, 'Improvement of accuracy and speed of a commercial AFM using positive position feedback control', Proceedings of the American Control Conference, St Louis, MO (2009) [E1]
DOI10.1109/acc.2009.5160335
CitationsScopus - 13Web of Science - 7
2009Chenniappan V, Moheimani SO, Yuce MR, 'A pendulum-like structure for design of oscillators', Advanced Materials Research, Singapore (2009) [E1]
DOI10.4028/www.scientific.net/amr.74.207
2008Pereira E, Moheimani SO, Aphale S, 'Op-Amp based analog implementation of the Integral Resonant Control Scheme', Proceedings ICAST 2008: 19th International Conference on Adaptive Structures and Technologies, Ascona, Switzerland (2008) [E2]
2008Yong YK, Liu K, Moheimani SO, 'H-infinity control for reducing cross-coupling in a compliant XY nanopositioning stage', Proceedings ICAST 2008: 19th International Conference on Adaptive Structures and Technologies, Ascona, Switzerland (2008) [E2]
Co-authorsYuenkuan Yong
2008Aphale SS, Fleming AJ, Moheimani SO, 'A second-order controller for resonance damping and tracking control of nanopositioning systems', Proceedings ICAST 2008: 19th International Conference on Adaptive Structures and Technologies, Ascona, Switzerland (2008) [E2]
Co-authorsAndrew Fleming
2008Aphale SS, Bhikkaji B, Moheimani SO, 'A closed-loop approach to reducing scan errors in nanopositioning platforms', Proceedings of the 17th World Congress of the International Federation of Automatic Control, Seoul, Korea (2008) [E1]
DOI10.3182/20080706-5-kr-1001.1413
2008Gawthrop PJ, Bhikkaji B, Moheimani SO, 'Physical-model-based control of a Piezoelectric tube scanner', Proceedings of the 17th World Congress of the International Federation of Automatic Control, Seoul, Korea (2008) [E1]
DOI10.3182/20080706-5-kr-1001.1545
2008Sebastian A, Pantazi A, Moheimani SO, Pozidis H, Eleftheriou E, 'A self servo writing scheme for a MEMS storage device with sub-nanometer precision', Proceedings of the 17th World Congress of the International Federation of Automatic Control, Seoul, Korea (2008) [E1]
DOI10.3182/20080706-5-kr-1001.2920
2008Yong YK, Liu K, Moheimani SOR, 'H8 control for reducing cross-coupling in a compliant XY nanopositioning stage', 19th International Conference on Adaptive Structures and Technologies 2008, ICAST 2008 (2008)

A compliant XY nanopositioning platform designed for scanning probe microscopy applications is presented in this article. The device possesses a very high out-of-plane stiffness r... [more]

A compliant XY nanopositioning platform designed for scanning probe microscopy applications is presented in this article. The device possesses a very high out-of-plane stiffness resulting in extremely low cross-coupling between various axes. However, cross-couplings between X-and Y-axes of the stage cannot be ignored during fast raster scans. A H8 controller is designed to minimize cross-coupling between these two axes of the nanoscale positioning stage, particularly at its mechanical resonance frequencies. The controller is augmented with integral action to achieve accurate tracking and damping. Raster scan results over an area of 10µm×10µm with small positioning errors are demonstrated. High-speed accurate raster scans of up to 100Hz, with nanoscale resolution are also illustrated.

Co-authorsYuenkuan Yong
2008Aphale SS, Fleming AJ, Moheimani SOR, 'A second-order controller for resonance damping and tracking control of nanopositioning systems', 19th International Conference on Adaptive Structures and Technologies 2008, ICAST 2008 (2008)

This paper presents a simple second-order controller that damps the resonance typical of piezoelectric nanopositioners and delivers good tracking performance. This method employs ... [more]

This paper presents a simple second-order controller that damps the resonance typical of piezoelectric nanopositioners and delivers good tracking performance. This method employs the Integral Resonant Control scheme (IRC) for damping the dominant resonant mode of the piezoelectric nanopositioner and uses an integral controller to achieve tracking performance. As disturbance rejection is a main concern in nanopositioning applications, the control scheme is tested for its disturbance rejection performance. It is seen that the control scheme has good disturbance rejection characteristics deeming it suitable for nanopositioning applications. To test the tracking performance, the system is made to track a 20 Hz triangular input at various integral gains. It is shown that improved tracking performance can be achieved at high gains with only a slight degradation in disturbance rejection performance at high frequencies.

Co-authorsAndrew Fleming
2008Pereira E, Moheimani SOR, Aphale SS, 'Op-Amp based analog implementation of the Integral Resonant Control scheme', 19th International Conference on Adaptive Structures and Technologies 2008, ICAST 2008 (2008)

The Integral Resonant Control (IRC) is a simple low-order control scheme that has been introduced as a high-performance controller design methodology for flexible structures with ... [more]

The Integral Resonant Control (IRC) is a simple low-order control scheme that has been introduced as a high-performance controller design methodology for flexible structures with collocated actuator-sensor pairs. It is capable of achieving significant damping, over several modes, while guaranteeing closed-loop stability of the system in presence of unmodelled out-of-bandwidth dynamics. These reasons make the IRC an ideal controller for various industrial damping applications, if packaged in a simple easy-to-implement electronic module. In this work, we propose an analog implementation of the IRC scheme using a single Op-Amp circuit. The goal is to demonstrate that with a simple analog realization of the modified IRC scheme, it is possible to damp a large number of vibration modes. A brief discussion about the modeling, circuit considerations, implementation and experimental results is presented in order to validate the usefulness and practicality of the proposed analog IRC implementation.

2008Mahmood IA-T, Liu K, Moheimani SO, 'Two sensor based H 8 control of a piezoelectric tube scanner', Proceedings of the 17th World Congress of the International Federation of Automatic Control, Seoul, Korea (2008) [E1]
DOI10.3182/20080706-5-kr-1001.1644
2008Aphale SS, Devasia S, Moheimani SO, 'Achieving high-bandwidth nanopositioning in presence of plant uncertainties', Proceedings of the 2008 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Xi'an, China (2008) [E1]
DOI10.1109/AIM.2008.4601788
2008Yong YK, Aphale SS, Moheimani SO, 'Design, analysis and control of a fast nanopositioning stage', Proceedings of the 2008 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Xi'an, China (2008) [E1]
DOI10.1109/aim.2008.4601703
CitationsScopus - 3
Co-authorsYuenkuan Yong
2008Bhikkaji B, Moheimani SO, Petersen IR, 'Multivariable integral control of resonant structures', Proceedings of the 47th IEEE Conference on Decision and Control, Cancun, Mexico (2008) [E1]
DOI10.1109/cdc.2008.4739230
CitationsScopus - 13Web of Science - 3
2007Aphale SS, Moheimani SO, Fleming AJ, 'Dominant resonant mode damping of a piezoelectric tube nanopositioner using optimal sensorless shunts', American Control Conference, 2007. ACC '07. proceedings, New York (2007) [E1]
DOI10.1109/acc.2007.4283080
Co-authorsAndrew Fleming
2007Aphale SS, Fleming AJ, Moheimani SOR, 'Integral resonant control of collocated smart structures', SMART MATERIALS & STRUCTURES (2007) [E4]
DOI10.1088/0964-1726/16/2/023Author URL
CitationsScopus - 1Web of Science - 82
Co-authorsAndrew Fleming
2007Mahmood IA-T, Moheimani SO, Bhikkaji B, 'Precise tip positioning of a flexible manipulator using resonant control', 2007 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Proceedings, Zurich, Switzerland (2007) [E1]
CitationsWeb of Science - 1
2007Clayton GM, Tien S, Fleming AJ, Moheimani SO, Devasia S, 'Hysteresis and Vibration Compensation in Piezoelectric Actuators by Integrating Charge Control and Inverse Feedforward', Preprints of the 4th IFAC-Symposium on Mechatronic Systems, Heidelberg, Germany (2007) [E1]
CitationsScopus - 1
Co-authorsAndrew Fleming
2007Aphale SS, Fleming AJ, Moheimani SO, 'Integral control of smart structures with collocated sensors and actuators', Proceedings of the European Control Conference 2007, Kos, Greece (2007) [E1]
Co-authorsAndrew Fleming
2007Mahmood IA-T, Bhikkaji B, Moheimani SO, 'Vibration and position control of a flexible manipulator', Conference Proceedings of 2007 Information, Decision and Control: IDC '07, Adelaide (2007) [E1]
CitationsScopus - 4
2007Fleming AJ, Wills AG, Moheimani SO, 'Sensor fusion for improved control of piezoelectric tube scanners', 2007 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. Proceedings, Zurich, Switzerland (2007) [E1]
Co-authorsAndrew Fleming
2007Aphale SS, Moheimani SOR, Fleming AJ, 'Dominant resonant mode damping of a piezoelectric tube nanopositioner using optimal sensorless shunts', 2007 AMERICAN CONTROL CONFERENCE, VOLS 1-13, New York, NY (2007) [E1]
Author URL
CitationsScopus - 1
Co-authorsAndrew Fleming
2007Bhikkaji B, Ratnam MR, Fleming AJ, Moheimani SO, 'High-Performance Control of a PZT Scanner', Preprints of the 4th IFAC-Symposium on Mechatronic Systems, Heidelberg, Germany (2007) [E1]
CitationsScopus - 1
Co-authorsAndrew Fleming
2007Aphale SS, Moheimani SO, Fleming AJ, 'Optimal Sensorless Shunts for Vibration Damping of a Piezoelectric Tube Nanopositioner', Proceedings of the 17th International Conference on Adaptive Structures and Technologies, Taipei, Taiwan (2007) [E2]
Co-authorsAndrew Fleming
2006Fleming AJ, Moheimani SO, 'Proof-Mass Inertial Vibration Control Using a Shunted Electromagnetic Transducer', Proceedings of 16th IFAC World Congress, Prague, Czech Republic (2006) [E1]
Co-authorsAndrew Fleming
2006Vautier BJG, Moheimani SO, 'Multivariable LQG Vibration Control Using Charge-Driven Piezoelectric Actuators', Proceedings of 16th IFAC World Congress, Prague, Czech Republic (2006) [E1]
2006McKelvey T, Moheimani SO, 'Estimation of Phase Constrained Mimo Transfer Functions with Application to Flexible Structures with Mixed Collocated and Non-Collocated Actuators and Sensors', Proceedings of 16th IFAC World Congress, Prague, Czech Republic (2006) [E1]
CitationsScopus - 1
2006Fleming AJ, Niederberger D, Moheimani SO, Morari M, 'Mitigation of acoustic resonance using electrically shunted loudspeakers', Proceedings of the Society of Photo-Optical Instrumentation Engineers: Smart Structures and Materials 2006: Damping and Isolation, San Diego, CA (2006) [E2]
Co-authorsAndrew Fleming
2006Bhikkaji B, Ratnam MR, Moheimani SO, 'PVPF control of piezoelectric tube scanners', Proceedings of the Society of Photo-Optical Instrumentation Engineers: Smart Structures and Materials 2006: Damping and Isolation, San Diego, CA (2006) [E2]
2005Moheimani SO, 'Mechatronic Systems 2004, A Proceedings Volume from the 3rd IFAC Symposium', Mechatronic Systems 2004, A Proceedings Volume from the 3rd IFAC Symposium, Sydney (2005) [E4]
2005Wills AG, Bates DR, Fleming AJ, Ninness BM, Moheimani SO, 'Application of MPC to an Active Structure Using Sampling Rates up To 25kHz', Proceedings of the 44th IEEE Conference On Decision And Control, Seville, Spain (2005) [E1]
CitationsScopus - 2Web of Science - 2
Co-authorsAndrew Fleming, Brett Ninness
2005Fleming AJ, Moheimani SO, 'Senor-less Vibration Suppression and Scan Compensation for Piezoelectric Tube Nanopositioners (invited paper)', Proceedings of the 44th IEEE Conference on Decision and Control, and the European Control Conference 2005, Seville, Spain (2005) [E1]
Co-authorsAndrew Fleming
2005Ratnam M, Bhikkaji B, Fleming AJ, Moheimani SO, 'PPF Control of a Piezoelectric Tube Scanner (invited paper)', Proceedings of the 44th IEEE Conference on Decision and Control, and the European Control Conference 2005, Seville, Spain (2005) [E1]
CitationsScopus - 19Web of Science - 9
Co-authorsAndrew Fleming
2005Moheimani SO, Vautier BJG, Bhikkaji B, 'Multivariable PPF Control of an Active Structure', Proceedings of the 44th IEEE Conference on Decision and Control, and the European Control Conference 2005, Seville, Spain (2005) [E1]
CitationsScopus - 1
2004Lau K, Quevedo DE, Goodwin GC, Moheimani SO, 'Multi-modal modulated and demodulated vibration control of flexible structures using piezoelectric transducers', Mechatronic Systems 2004, A Proceedings Volume from the 3rd IFAC Symposium, Sydney (2004) [E1]
Co-authorsGraham Goodwin, Daniel Quevedo
2004Fleming AJ, Moheimani SO, 'Hybrid DC accurate charge amplifier for linear piezoelectric positioning', Mechatronic Systems 2004, A Proceedings Volume from the 3rd IFAC Symposium, Sydney (2004) [E1]
Co-authorsAndrew Fleming
2004Niederberger D, Fleming AJ, Moheimani SO, Morari M, 'Online-tuned multi-mode resonant piezoelectric shunt for broadband vibration suppression', Mechatronic Systems 2004, A Proceedings Volume from the 3rd IFAC Symposium, Sydney (2004) [E1]
Co-authorsAndrew Fleming
2004Behrens S, Fleming AJ, Moheimani SO, 'Negative inductor-resistor controller for electromagnetic shunt damping', Mechatronic Systems 2004, A Proceedings Volume from the 3rd IFAC Symposium, Sydney (2004) [E1]
Co-authorsAndrew Fleming
2004Moheimani SO, 'Recent developments in structural vibration control using piezoelectric transducers', Conference Paper, Prague, Czech Republic (2004) [E1]
2004Behrens S, Fleming AJ, Moheimani SO, 'Control orientated synthesis of electromagnetic shunt impedances for vibration isolation', CD ROM, Sydney (2004) [E1]
Co-authorsAndrew Fleming
2004Behrens S, Fleming AJ, Moheimani SO, 'Vibration isolation using a shunted electromagnetic transducer', Conference Paper, San Diego California USA (2004) [E2]
CitationsScopus - 3Web of Science - 4
Co-authorsAndrew Fleming
2004Fleming AJ, Moheimani SO, 'Synthesis of optimal piezoelectric shunt impedances for structural vibration control', Conference Paper, San Diego California USA (2004) [E2]
CitationsScopus - 2Web of Science - 1
Co-authorsAndrew Fleming
2003Behrens S, Fleming AJ, Moheimani SOR, 'Electromagnetic shunt damping', PROCEEDINGS OF THE 2003 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM 2003), VOLS 1 AND 2, KOBE, JAPAN (2003)
Author URL
CitationsWeb of Science - 12
Co-authorsAndrew Fleming
2003Vautier BJG, Moheimani SO, 'Avoiding hysteresis in vibration control using piezoelectric laminates', Proceedings 42nd IEEE Conference on Decision and Cont, Maui, Hawaii (2003) [E1]
2003Fleming AJ, Behrens S, Moheimani SO, 'Active LQR and H2 shunt control of electromagnetic transducers', Proceedings for CDC 2003 (CD ROM), Maui, Hawaii, USA (2003) [E1]
CitationsScopus - 6Web of Science - 1
Co-authorsAndrew Fleming
2003Behrens S, Fleming AJ, Moheimani SO, 'Electrodynamic Vibration Suppression', Proceedings of SPIE, San Diego, California (2003) [E2]
CitationsScopus - 6Web of Science - 6
Co-authorsAndrew Fleming
2003Fleming AJ, Moheimani SO, 'Improved current and charge amplifiers for driving piezoelectric loads', Proceedings of SPIE, San Diego, California (2003) [E2]
CitationsScopus - 2Web of Science - 1
Co-authorsAndrew Fleming
2003Behrens S, Fleming AJ, Moheimani SO, 'Robust passive Piezoelectric Shunt Dampener', Proceedings of SPIE, San Diego, California (2003) [E2]
Co-authorsAndrew Fleming
2003Fleming AJ, Behrens S, Moheimani SO, 'An Autonomous Piezoelectric Shunt Damping System', Proceedings of SPIE, San Diego, California (2003) [E2]
CitationsScopus - 7Web of Science - 2
Co-authorsAndrew Fleming
2002Moheimani SO, Fleming AJ, Behrens S, 'On the Feedback Structure of Wideband Piezoelectric Shunt Damping Systems', 15th Triennial World Congress, Barcelona, Spain (2002) [E1]
Co-authorsAndrew Fleming
2002Moheimani SO, Halim D, 'A Convex Optimization Approach to the Mode Acceleration Problem', 15th Triennial World Congress, Barcelona, Spain (2002) [E1]
2002Moheimani SO, Behrens S, Fleming AJ, 'Dynamics and Stability of Wideband Vibration Absorbers with Multiple Piezoelectric Transducers', 15th Triennial World Congress, Barcelona, Spain (2002) [E1]
Co-authorsAndrew Fleming
2002Behrens S, Moheimani SO, Fleming AJ, 'Multiple Mode Passive Piezoelectric Shunt Dampener', Mechatronic Systems, Berkeley, California, USA (2002) [E1]
Co-authorsAndrew Fleming
2002Fleming AJ, Moheimani SO, 'The Effect of Artificially Reducing the Size of Inductors in Piezoelectric Shunt Damping Circuits', Mechatronic Systems, Berkeley, California, USA (2002) [E1]
Co-authorsAndrew Fleming
2002Fleming AJ, Moheimani SO, 'Power Harvesting Piezoelectric Shunt Damping', Mechatronic Systems, Berkeley, California, USA (2002) [E1]
Co-authorsAndrew Fleming
2002Behrens S, Fleming AJ, Moheimani SO, 'Series-Parallel Impedance Structure for Piezoelectric Vibration Damping', Proceedings of SPIE - Smart Materials II, Melbourne, Australia (2002) [E1]
CitationsScopus - 4Web of Science - 2
Co-authorsAndrew Fleming
2002Moheimani SO, Behrens S, 'Multi-mode piezoelectric shunt damping with a highly resonant impedance', Proceedings of the 2002 IEEE International Conference on Control Applications, Glasgow, Scotland (2002) [E1]
CitationsScopus - 1Web of Science - 1
2002Halim D, Moheimani SO, 'Compensating for the trunction error in models of resonant systems that include damping', Proceedings of the 41st IEEE Conference on Decision and Control, Las Vegas, Nevada, USA (2002) [E1]
CitationsScopus - 1
2002Fleming AJ, Moheimani SO, 'Adaptive Piezoelectric Shunt Damping', Smart Structures and Materials 2002: Damping and Isolation, San Diego, USA (2002) [E1]
CitationsScopus - 56Web of Science - 7
Co-authorsAndrew Fleming
2002Behrens S, Moheimani SO, 'Current Flowing Multiple Mode Piezoelectric Shunt Dampener', Smart Structures and Materials 2002:Damping and Isolation, San Diego, USA (2002) [E1]
CitationsScopus - 14Web of Science - 10
2001Halim D, Moheimani SO, 'Spatial Control of Flexible Structures - Application of Spatial H~ control to a Piezoelectric Laminate Beam', Proceedings of the American Control Conference, Arlington, Virginia (2001) [E1]
CitationsScopus - 2Web of Science - 1
2001Halim D, Moheimani SO, 'Spatial Resonant Control with Collocated Piezoelectric Actuator/Sensor Pairs', Proceedings of the American Control Conference, Arlington, Virginia (2001) [E1]
CitationsScopus - 2
2001Halim D, Moheimani SO, 'Experiments on Spatial H2 Control for Vibration Suppression of a Piezoelectric Laminate Beam', Proceedings of 40th IEEE Conference on Decision and Control, Orlando,Florida USA (2001) [E1]
CitationsScopus - 1Web of Science - 2
2000Moheimani SOR, 'Minimizing the effect of out-of-bandwidth dynamics in the models of reverberant systems that arise in modal analysis: implications on spatial H(infinity) Control', AUTOMATICA (2000) [E1]
DOI10.1016/S0005-1098(00)00012-1Author URL
CitationsScopus - 26Web of Science - 23
2000Behrens S, Moheimani SO, 'Optimal Resistive Elements for Multiple Mode Shunt Damping of a Piezoelectric Laminate Beam', CDC Downunder (CD-Rom), Sydney, Australi (2000) [E1]
CitationsScopus - 10Web of Science - 7
2000McKelvey T, Fleming AJ, Moheimani SO, 'Subspace based system identification for an acoustic enclosure', Proceedings of IEEE International Conference on Control Applications & IEEE International Symposium on Computer-Aided Control Systems Design, Alaska, USA (2000) [E1]
CitationsScopus - 36Web of Science - 19
Co-authorsAndrew Fleming
2000Fleming AJ, Behrens S, Moheimani SO, 'A New Approach to Piezoelectric Shunt Damping', Proceedings of IS3M 2000 Symposium, Hong Kong (2000) [E1]
Co-authorsAndrew Fleming
2000De Dona JA, Moheimani SO, Goodwin GC, 'Robust combined PLC/LHG controller with allowed over-saturation of the input signal', Proceedings of the American Control Conference, Chicago, Illinois, USA (2000) [E1]
CitationsScopus - 10Web of Science - 9
Co-authorsJose Dedona, Graham Goodwin
2000Moheimani SO, Heath WP, 'Model correction for a class of spatio-temporal systems', Proceedings of the American Control Conference, Chicago, Illinois, USA (2000) [E1]
CitationsScopus - 7Web of Science - 7
2000Moheimani SO, Clark RL, 'Minimizing the truncation error in assumed modes models of structures', Proceedings of the American Control Conference, Chicago, Illinois, USA (2000) [E1]
CitationsScopus - 1Web of Science - 7
2000Halim D, Moheimani SO, 'Experiments in Spatial H Control of a Piezoelectric Laminate Beam', Robust Control Workshop 2000 - Workshop Proceedings (CD-Rom), Newcastle, Australia (2000) [E2]
CitationsWeb of Science - 1
2000Moheimani SOR, Clark RL, 'Minimizing the truncation error in assumed modes models of structures', PROCEEDINGS OF THE 2000 AMERICAN CONTROL CONFERENCE, VOLS 1-6, CHICAGO, IL (2000)
Author URL
CitationsWeb of Science - 1
1999Petersen IR, Moheimani SO, Pota HR, 'Minimax LQG Optimal Control of Acoustic Noise in a Duct', IFAC World Congress 1999, Beijing, P.R. China (1999) [E1]
1999De Dona JA, Moheimani SO, Goodwin GC, Feuer A, 'Allowing for Over-Saturation in Robust Switching Control of a Class of Uncertain Systems', Proceedings of the 38th Conference on Decision and Control, Phoenix, Arizona USA (1999) [E1]
CitationsScopus - 2
Co-authorsGraham Goodwin, Jose Dedona
1999Moheimani SO, Ryall T, 'Considerations on Placement of Piezoceramic Actuators that are used in Structural Vibration Control', Proceedings of the 38th Conference on Decision and Control, Phoenix, Arizona USA (1999) [E1]
CitationsScopus - 22
1999Moheimani SO, 'An Experimental Verification of the Reduced Order Transfer Function of a Piezoelectric Laminate Beam', Proceedings of the 38th Conference on Decision and Control, Phoenix, Arizona USA (1999) [E1]
1999Moheimani SO, 'Minimizing the Effect of out of Bandwidth Dynamics in the Models of Reverberant Systems that arise in Modal Analysis: Implications on Spatial H(infinity) Control', Proceedings of the 38th Conference on Decision and Control, Phoenix, Arizona USA (1999) [E1]
1999Pota HR, Moheimani SO, Smith M, 'Resonant Controllers for Flexible Structures', Proceedings of the 38th Conference on Decision and Control, Phoenix, Arizona USA (1999) [E1]
CitationsScopus - 33
1999Moheimani SO, 'Minimizing the Effect of Out of Bandwidth Modes in the Truncated Assumed Modes Models of Structures', Proceedings of the American Control Conference, San Diego, California, USA (1999) [E1]
CitationsScopus - 6
1998Moheimani SO, Pota HR, Petersen IR, 'Active control of noise and vibration in acoustic ducts and flexible structures - a Spatial Control approach', Proceedings of the 1998 American Control Conference, Philadelphia, Pennsylvania (1998) [E1]
CitationsScopus - 6Web of Science - 4
1998Moheimani SO, Pota HR, Petersen IR, 'Spatial Control of Active Vibration Control of Piezoelectric Laminates', Proceedings of the 37th IEEE Conference on Decision and Control, Tampa, Florida USA (1998) [E1]
CitationsScopus - 10Web of Science - 9
1998Moheimani SO, Fu M, 'Spatial H2 norm of flexible structures and its application in model order selection', Proceedings on the 37th IEEE Conference on Decision and Control, Tampa, Florida USA (1998) [E1]
CitationsScopus - 11Web of Science - 18
Co-authorsMinyue Fu
1997Esfahani SH, Moheimani R, Petersen IR, 'An LMI approach to suboptimal guaranteed cost control for uncertain time-delay systems', I E T Control Theory and Applications, - (1997) [E1]
1997Moheimani R, Pota HR, Petersen IR, 'Broadband disturbance attenuation over an entire beam', Proceedings of European Control Conference, - (1997) [E1]
1997Moheimani R, Petersen I, 'Guaranteed cost control of uncertain systems with a time-multiplied quadratic cost function: An approach based on linear Matrix inequalities', Proceedings of European Control Conference, - (1997) [E1]
1997Esfahani SH, Moheimani R, Petersen IR, 'Optimal guaranteed-cost control with pole placement for uncertain systems: an {LMI} approach', Proceedings of IFAC Symposium on Robust Control Design, - (1997) [E1]
1997Moheimani R, Pota HR, Petersen IR, 'Spatial balanced model reduction for flexible structures', Proceedings of The 35th IEEE Conference on Decision and Control, - (1997) [E1]
CitationsScopus - 5Web of Science - 3
1996Moheimani R, Savkin AV, Petersen IR, 'The robust fixed interval smoothing problem and robust observability of uncertain time-varying systems', Proceedings of IFAC World Congress, - (1996) [E1]
1996Moheimani R, Savkin AV, Petersen IR, 'A survey of robust filtering results for uncertain systems with Integral Quadratic Constraints', Proceedings of MTNS 1996, - (1996) [E1]
1996Moheimani R, Savkin AV, Petersen IR, 'Robust prediction of uncertain systems with an integral quadratic constraint and a control input', Proceedings of MTNS 1996, - (1996) [E1]
1996Moheimani R, Savkin AV, Petersen IR, 'Synthesis of minimax optimal controllers for uncertain time-delay systems with structured uncertainty', Proceedings of MTNS 1996, - (1996) [E1]
1996Moheimani R, Savkin AV, Petersen IR, 'A deterministic approach to the design of robust predictors', Proceedings of The 35th IEEE Conference on Decision and Control, - (1996) [E1]
1996Moheimani R, Savkin AV, Petersen IR, 'Necessary and sufficient conditions for robust observability of a class of discrete-time uncertain systems', Proceedings of The 35th IEEE Conference on Decision and Control, - (1996) [E1]
1996Moheimani R, Savkin AV, Petersen I, 'Robust control of uncertain time-delay systems - a minimax optimal approach', Proceedings of The 35th IEEE Conference on Decision and Control, - (1996) [E1]
CitationsScopus - 1
1996Moheimani R, Savkin AV, Petersen IR, 'Robust filtering, prediction, smoothing and observability of uncertain systems', Proceedings of The 35th IEEE Conference on Decision and Control, - (1996) [E1]
CitationsWeb of Science - 1
1995Moheimani R, Petersen IR, 'Optimal guaranteed cost control of uncertain systems via static and dynamic output feedback', Proceedings of Control Conference 1995, 1995 (1995) [E1]
1995Moheimani R, Savkin AV, Petersen IR, 'Robust prediction of uncertain systems with an integral quadratic constraint and a control input', Proceedings of Control Conference 1995, - (1995) [E1]
1995Moheimani R, Petersen IR, 'Optimal quadratic guaranteed cost control of a class of uncertain time-delay systems', Proceedings of IEEE Conference on Decision and Control, - (1995) [E1]
CitationsScopus - 8Web of Science - 5
1995Moheimani R, Savkin AV, Petersen IR, 'A connection between ${H}_{infty}$ control and absolute stabilizability of discrete-time uncertain systems', Proceedings of IFAC Conference on System Structure and Control, - (1995) [E1]
1995Moheimani R, Petersen IR, 'Quadratic guaranteed cost control with robust pole placement in a disk', Proceedings of The Third European Control Conference, - (1995) [E1]
1995Moheimani R, Petersen IR, 'Robust control with pole placement in a sector for a class of uncertain systems', Proceedings of The Third European Control Conference, - (1995) [E1]
1994Moheimani R, Stirling D, Petersen IR, Macfarlane DC, 'Robust control of a {S}endzimir mill', The 3rd {IEEE} conference on Control and applications, - (1994) [E1]
CitationsScopus - 3
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Grants and Funding

Summary

Number of grants40
Total funding$19,128,106

Click on a grant title below to expand the full details for that specific grant.


20141 grants / $37,585

Cantilever mass sensing application in a microfluidic device$37,585

Funding body: CSIRO - Commonwealth Scientific and Industrial Research Organisation

Funding bodyCSIRO - Commonwealth Scientific and Industrial Research Organisation
Project TeamProfessor Reza Moheimani, Mr Michael Ruppert
SchemePostgraduate Scholarship
RoleLead
Funding Start2014
Funding Finish2014
GNoG1400764
Type Of FundingOther Public Sector - Commonwealth
Category2OPC
UONY

20131 grants / $420,000

Control, estimation and nanopositioning for high-throughput probe-storage $420,000

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamProfessor Reza Moheimani
SchemeDiscovery Projects
RoleLead
Funding Start2013
Funding Finish2013
GNoG1200018
Type Of FundingAust Competitive - Commonwealth
Category1CS
UONY

20125 grants / $626,912

Facility for Characterization of Engineered Microelectromechanical Systems$300,000

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamProfessor Reza Moheimani, Professor Erich Kisi, Scientia Professor Ian Petersen, Professor Gursel Alici, Dr Elanor Huntington, Dr Sam Behrens, Associate Professor Charles Harb, Dr Hermanshu Pota, Associate Professor Weihua Li, Doctor James Welsh, Doctor Terrence Summers
SchemeLinkage Infrastructure Equipment & Facilities (LIEF)
RoleLead
Funding Start2012
Funding Finish2012
GNoG1100803
Type Of FundingScheme excluded from IGS
CategoryEXCL
UONY

Facility for Characterization of Engineered Microelectromechanical Systems$200,000

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani, Professor Erich Kisi, Doctor James Welsh, Doctor Terrence Summers
SchemeEquipment Grant
RoleLead
Funding Start2012
Funding Finish2012
GNoG1100690
Type Of FundingInternal
CategoryINTE
UONY

Facility for Characterization of Engineered Microelectromechanical Systems$53,621

Funding body: CSIRO - Commonwealth Scientific and Industrial Research Organisation

Funding bodyCSIRO - Commonwealth Scientific and Industrial Research Organisation
Project TeamProfessor Reza Moheimani, Professor Erich Kisi, Scientia Professor Ian Petersen, Professor Gursel Alici, Dr Elanor Huntington, Dr Sam Behrens, Associate Professor Charles Harb, Dr Hermanshu Pota, Associate Professor Weihua Li, Doctor James Welsh, Doctor Terrence Summers
SchemeLinkage Infrastructure Equipment & Facilities (LIEF) Partner funding
RoleLead
Funding Start2012
Funding Finish2012
GNoG1200708
Type Of FundingScheme excluded from IGS
CategoryEXCL
UONY

Facility for Characterization of Engineered Microelectromechanical Systems$53,291

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamProfessor Reza Moheimani, Professor Erich Kisi, Scientia Professor Ian Petersen, Professor Gursel Alici, Dr Elanor Huntington, Dr Sam Behrens, Associate Professor Charles Harb, Dr Hermanshu Pota, Associate Professor Weihua Li, Doctor James Welsh, Doctor Terrence Summers
SchemeLinkage Infrastructure Equipment & Facilities (LIEF) Partner funding
RoleLead
Funding Start2012
Funding Finish2012
GNoG1200709
Type Of FundingScheme excluded from IGS
CategoryEXCL
UONY

High-performance controller design for high-speed manipulation and imaging at nanometre-scale $20,000

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani, Doctor Mehmet Yuce
SchemeNear Miss Grant
RoleLead
Funding Start2012
Funding Finish2012
GNoG1200669
Type Of FundingInternal
CategoryINTE
UONY

20111 grants / $25,000

Innovations in Feedback-Controlled Nanoscale Manipulation and Imaging$25,000

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani, Doctor Yuen Yong
SchemeNear Miss Grant
RoleLead
Funding Start2011
Funding Finish2011
GNoG1001038
Type Of FundingInternal
CategoryINTE
UONY

20101 grants / $35,000

Multidimensional vibration energy harvesting$35,000

Funding body: CSIRO - Energy Technology

Funding bodyCSIRO - Energy Technology
Project TeamProfessor Reza Moheimani
SchemePostgraduate Research Scholarship
RoleLead
Funding Start2010
Funding Finish2010
GNoG1000732
Type Of FundingOther Public Sector - Commonwealth
Category2OPC
UONY

20094 grants / $1,636,400

Advanced model-based control for ultra-fast and ultra-high-precision nanoscale positioning$891,200

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamProfessor Reza Moheimani
SchemeFuture Fellowships
RoleLead
Funding Start2009
Funding Finish2009
GNoG0189719
Type Of FundingAust Competitive - Commonwealth
Category1CS
UONY

Signal Transformation Approach to Nanopositioning$25,200

Funding body: IBM Research - Zurich

Funding bodyIBM Research - Zurich
Project TeamProfessor Reza Moheimani
SchemeJoint Study Agreement
RoleLead
Funding Start2009
Funding Finish2009
GNoG0190527
Type Of FundingInternational - Non Competitive
Category3IFB
UONY

20083 grants / $6,508,084

Centre for Complex Dynamic Systems and Control$5,400,000

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamEmeritus Laureate Professor Graham Goodwin, Professor Minyue Fu, Professor Reza Moheimani, Doctor Julio Braslavsky, Doctor Gregory Adams, Associate Professor Jose De Dona, Doctor Maria Seron, Doctor James Welsh, Doctor Andrew Fleming, Associate Professor Tristan Perez, Doctor Damian Marelli, Associate Professor Brailey Sims, Conjoint Professor Kerrie Mengersen, Professor A Pettitt, Dr R Reeves, Professor Ian Turner, Dr Salvatore Crisafulli, Dr M Downey, Mr J Lee, Mr P Stone, Conjoint Professor John Rayner
SchemeARC Centres of Excellence
RoleInvestigator
Funding Start2008
Funding Finish2008
GNoG0188623
Type Of FundingAust Competitive - Commonwealth
Category1CS
UONY

CDSC Sub-Account: Mechatronics$785,000

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamEmeritus Laureate Professor Graham Goodwin, Professor Reza Moheimani, Doctor Andrew Fleming
SchemeARC Centres of Excellence
RoleInvestigator
Funding Start2008
Funding Finish2008
GNoGS090005
Type Of FundingAust Competitive - Commonwealth
Category1CS
UONY

Centre for Complex Dynamic Systems and Control$323,084

Funding body: NSW Department of State and Regional Development

Funding bodyNSW Department of State and Regional Development
Project TeamEmeritus Laureate Professor Graham Goodwin, Professor Minyue Fu, Professor Reza Moheimani, Doctor Julio Braslavsky, Doctor Gregory Adams, Associate Professor Jose De Dona, Doctor Maria Seron, Doctor James Welsh, Doctor Andrew Fleming, Doctor Damian Marelli, Associate Professor Brailey Sims, Conjoint Professor Kerrie Mengersen, Professor A Pettitt, Dr R Reeves, Professor Ian Turner, Dr Salvatore Crisafulli, Dr M Downey, Mr J Lee, Mr P Stone
SchemeCentres of Excellence (Partner)
RoleInvestigator
Funding Start2008
Funding Finish2008
GNoG0189187
Type Of FundingOther Public Sector - State
Category2OPS
UONY

20072 grants / $884,000

Robust Control of Electrostatic Microactuators$870,000

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamProfessor Reza Moheimani, Doctor Mehmet Yuce
SchemeDiscovery Projects
RoleLead
Funding Start2007
Funding Finish2007
GNoG0186355
Type Of FundingAust Competitive - Commonwealth
Category1CS
UONY

RQF Support for Assistant Dean (Research)$14,000

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani
SchemeSpecial Project Grant
RoleLead
Funding Start2007
Funding Finish2007
GNoG0187948
Type Of FundingInternal
CategoryINTE
UONY

20062 grants / $928,875

Nano-positioning facility for nano-scale measurement and manipulation$530,000

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamProfessor Reza Moheimani, Scientia Professor Ian Petersen, Emeritus Laureate Professor Graham Goodwin, Professor Rick Middleton, Professor Minyue Fu, Dr Valeri Ougrinovska, Dr Hermanshu Pota, Doctor Andrew Fleming, Dr Steven Schofield
SchemeLinkage Infrastructure Equipment & Facilities (LIEF)
RoleLead
Funding Start2006
Funding Finish2006
GNoG0185548
Type Of FundingScheme excluded from IGS
CategoryEXCL
UONY

Advanced Control of Dual-Stage Hard Disk Drives$398,875

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamProfessor Reza Moheimani
SchemeDiscovery Projects
RoleLead
Funding Start2006
Funding Finish2006
GNoG0185298
Type Of FundingAust Competitive - Commonwealth
Category1CS
UONY

20053 grants / $19,782

Advanced Control of Dual-Stage Hard Disk Drives$9,105

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani
SchemeProject Grant
RoleLead
Funding Start2005
Funding Finish2005
GNoG0184640
Type Of FundingInternal
CategoryINTE
UONY

High speed nano-positioner for scanning probe microscopy and nano-manufacturing$8,277

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani, Professor Minyue Fu
SchemeProject Grant
RoleLead
Funding Start2005
Funding Finish2005
GNoG0184716
Type Of FundingInternal
CategoryINTE
UONY

44th IEEE Conference on Decision and Control and European Control Conference ECC 2005, 12-15 December 2005$2,400

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani
SchemeTravel Grant
RoleLead
Funding Start2005
Funding Finish2005
GNoG0185925
Type Of FundingInternal
CategoryINTE
UONY

20041 grants / $8,966

Sensor-less electromagnetic noise control in acoustic enclosures$8,966

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani
SchemeProject Grant
RoleLead
Funding Start2004
Funding Finish2004
GNoG0183489
Type Of FundingInternal
CategoryINTE
UONY

20032 grants / $7,105,929

Centre for Complex Dynamic Systems and Control.$6,929,432

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamProfessor Rick Middleton, Emeritus Laureate Professor Graham Goodwin, Professor Minyue Fu, Conjoint Professor Kerrie Mengersen, Professor Iain Raeburn, Professor Reza Moheimani, Dr William Heath, Doctor Julio Braslavsky, Associate Professor Jose De Dona, Doctor Richard Gerlach, Doctor Maria Seron, Associate Professor Brailey Sims
SchemeARC Centres of Excellence
RoleInvestigator
Funding Start2003
Funding Finish2003
GNoG0182216
Type Of FundingAust Competitive - Commonwealth
Category1CS
UONY

Robust Control and System Identification of Highly Resonant Systems.$176,497

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamProfessor Reza Moheimani, Professor Brett Ninness
SchemeDiscovery Projects
RoleLead
Funding Start2003
Funding Finish2003
GNoG0182060
Type Of FundingAust Competitive - Commonwealth
Category1CS
UONY

20023 grants / $106,904

Robust control of spatially distributed uncertain systems$92,000

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamProfessor Reza Moheimani
SchemeDiscovery Projects
RoleLead
Funding Start2002
Funding Finish2002
GNoG0181101
Type Of FundingAust Competitive - Commonwealth
Category1CS
UONY

Control of emitted noise from switched reluctance drives using shunted piezoelectric transducers$12,504

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani, Doctor Colin Coates, Professor Robert Betz
SchemeProject Grant
RoleLead
Funding Start2002
Funding Finish2002
GNoG0181289
Type Of FundingInternal
CategoryINTE
UONY

IEEE Conference on Control Applications, Glasgow, Scotland 17-20 September 2002$2,400

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani
SchemeTravel Grant
RoleLead
Funding Start2002
Funding Finish2002
GNoG0182295
Type Of FundingInternal
CategoryINTE
UONY

20013 grants / $20,400

Vibration reduction by shunt-damping of peizoelectric actuators.$13,000

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani
SchemeProject Grant
RoleLead
Funding Start2001
Funding Finish2001
GNoG0179939
Type Of FundingInternal
CategoryINTE
UONY

Modeling and identification of spatio-temporal systems for control via modal analysis$5,000

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamDr William Heath, Professor Reza Moheimani
SchemeProject Grant
RoleInvestigator
Funding Start2001
Funding Finish2001
GNoG0180023
Type Of FundingInternal
CategoryINTE
UONY

American Control Conference, USA 25-27 June 2001$2,400

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani
SchemeTravel Grant
RoleLead
Funding Start2001
Funding Finish2001
GNoG0180940
Type Of FundingInternal
CategoryINTE
UONY

20003 grants / $79,002

Direct feedback control of vibrations using piezoelectric actuators$52,131

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani, Professor Rick Middleton
SchemeMulti-Year Project Grant Scholarship
RoleLead
Funding Start2000
Funding Finish2000
GNoG0178814
Type Of FundingInternal
CategoryINTE
UONY

Optimal placement of Piezoceramic actuators for Vibration Control.$25,000

Funding body: Defence Science and Technology Organisation

Funding bodyDefence Science and Technology Organisation
Project TeamProfessor Reza Moheimani
SchemeAeronautical and Maritime Research Laboratory (AMRL)
RoleLead
Funding Start2000
Funding Finish2000
GNoG0179192
Type Of FundingOther Public Sector - Commonwealth
Category2OPC
UONY

International Symposium on Smart Structures and Microsystems 2000, Hong Kong 19-21 October 2000$1,871

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani
SchemeTravel Grant
RoleLead
Funding Start2000
Funding Finish2000
GNoG0180165
Type Of FundingInternal
CategoryINTE
UONY

19994 grants / $683,088

Smart Structures Control Laboratory$500,000

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project Team
SchemeLinkage Infrastructure Equipment & Facilities (LIEF)
RoleLead
Funding Start1999
Funding Finish1999
GNo
Type Of FundingAust Competitive - Commonwealth
Category1CS
UONY

Controller design methodologies for active vibration control of piezoelectric laminates$171,688

Funding body: ARC (Australian Research Council)

Funding bodyARC (Australian Research Council)
Project TeamProfessor Reza Moheimani
SchemeAustralian Postdoctoral Research Fellowship
RoleLead
Funding Start1999
Funding Finish1999
GNoG0177873
Type Of FundingAust Competitive - Commonwealth
Category1CS
UONY

Robust Filtering and Parameter Estimation for Active Noise Control$9,000

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani, Professor Minyue Fu
SchemeProject Grant
RoleLead
Funding Start1999
Funding Finish1999
GNoG0178040
Type Of FundingInternal
CategoryINTE
UONY

IEEE Conference on Decision and Control Phoenix, Arizona, USA.$2,400

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani
SchemeTravel Grant
RoleLead
Funding Start1999
Funding Finish1999
GNoG0180460
Type Of FundingInternal
CategoryINTE
UONY

19981 grants / $2,179

American Control Conference, USA 22-26 June 1998$2,179

Funding body: University of Newcastle

Funding bodyUniversity of Newcastle
Project TeamProfessor Reza Moheimani
SchemeTravel Grant
RoleLead
Funding Start1998
Funding Finish1998
GNoG0180357
Type Of FundingInternal
CategoryINTE
UONY
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Research Supervision

Current Supervision

CommencedResearch Title / Program / Supervisor Type
2014MEMS-Based Nanopositioning for On-Chip High-Speed Scanning Probe Microscopy
Electrical Engineering, Faculty of Engineering and Built Environment
Principal Supervisor
2014Applications of Sensing Technologies in MEMS
Electrical Engineering, Faculty of Engineering and Built Environment
Principal Supervisor
2013Robustness in System Identification
Electrical Engineering, Faculty of Engineering and Built Environment
Co-Supervisor
2013Multi-modal Q-Control in Multi-frequency Atomic Force Microscopy
Electrical Engineering, Faculty of Engineering and Built Environment
Principal Supervisor
2012Design, Analysis and Control of a MEMS Micro-Gripper
Electrical Engineering, Faculty of Engineering and Built Environment
Principal Supervisor

Past Supervision

YearResearch Title / Program / Supervisor Type
2014Design and Analysis of Novel Microelectromechanical Systems for Energy Harvesting and Nanopositioning Applications
Electrical Engineering, Faculty of Engineering and Built Environment
Principal Supervisor
2014Design, Characterization and Control of Serial-Kinematic X-Y-Z Nanopositioner for High-Speed Atomic Force Microscopy
Electrical Engineering, Faculty of Engineering and Built Environment
Principal Supervisor
2014High Precision MEMS Displacement Sensors Device Techniques and Readout Circuits
Electrical Engineering, Faculty of Engineering and Built Environment
Co-Supervisor
2014Control and Estimation Techniques for High-Bandwidth Dynamic Mode Atomic Force Microscopy
Electrical Engineering, Faculty of Engineering and Built Environment
Principal Supervisor
2013Feedback Control of the Atomic Force Microscope Micro-cantilever for Improved Imaging
Electrical Engineering, Faculty of Engineering and Built Environment
Principal Supervisor
2010Vibration and Position Control of Piezoelectric Tube Scanners for Fast Atomic Force Microscopy
Electrical Engineering, Faculty of Engineering and Built Environment
Principal Supervisor
2005Vibration Control Using Shunted Piezoelectric and Electromagnetic Transducers
Electrical Engineering, Faculty of Engineering and Built Environment
Principal Supervisor
2004Charge-Driven Piezoelectric Actuators in Structural Vibration Control Applications
Elec&Electronic Eng&Technology, Faculty of Engineering and Built Environment
Principal Supervisor
2004Charge-Driven Piezoelectric Actuators in Structural Vibration Control Applications
Electrical Engineering, University of Newcastle
Principal Supervisor
2004Synthesis and Implementation of Sensor-less Shunt Controllers for Piezoelectric and Electromagnetic Vibration Control
Electrical Engineering, Faculty of Engineering and Built Environment
Principal Supervisor
2003Vibration Analysis and Control of Smart Structures
Electrical Engineering, Faculty of Engineering and Built Environment
Principal Supervisor
2001Passive and Semi-active Vibration Control of Piezoelectric Laminates
Electrical Engineering, University of Newcastle
Principal Supervisor
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Professor Reza Moheimani

Position

Professor
School of Elect Engineering and Computer Science
Faculty of Engineering and Built Environment

Focus area

Electrical and Computer Engineering

Contact Details

Emailreza.moheimani@newcastle.edu.au
Phone(02) 4921 6030
Fax(02) 4921 6993

Office

RoomEAG27
BuildingEngineering A
LocationCallaghan
University Drive
Callaghan, NSW 2308
Australia
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